TY - JOUR
T1 - InAs/GaAs (1 1 1)A heteroepitaxial systems
AU - Yamaguchi, H.
AU - Kanisawa, K.
AU - Miyashita, S.
AU - Hirayama, Y.
N1 - Funding Information:
This work was supported by the NEDO International Joint Research Grant Program, “Nanoelasticity”.
PY - 2004/7
Y1 - 2004/7
N2 - We studied the structural, electrical, and mechanical properties of an InAs thin film grown on GaAs (111)A substrates by molecular beam epitaxy. In contrast to conventionally used (001) surfaces, where Stranski-Krastanov growth dominates the highly mismatched heteroepitaxy, layer-by-layer growth of InAs can be established. One of the largest advantages of this unique heteroepitaxial system is that it provides a two-dimensional electron gas system in the near-surface region without the problem of electron depletion. We review the fundamental properties and applications of this unique heteroepitaxial system.
AB - We studied the structural, electrical, and mechanical properties of an InAs thin film grown on GaAs (111)A substrates by molecular beam epitaxy. In contrast to conventionally used (001) surfaces, where Stranski-Krastanov growth dominates the highly mismatched heteroepitaxy, layer-by-layer growth of InAs can be established. One of the largest advantages of this unique heteroepitaxial system is that it provides a two-dimensional electron gas system in the near-surface region without the problem of electron depletion. We review the fundamental properties and applications of this unique heteroepitaxial system.
KW - Heterostructures
KW - InAs/AlGaSb
KW - MEMS
KW - NEMS
KW - Piezoresistance
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U2 - 10.1016/j.physe.2003.11.278
DO - 10.1016/j.physe.2003.11.278
M3 - Conference article
AN - SCOPUS:3142709411
SN - 1386-9477
VL - 23
SP - 285
EP - 292
JO - Physica E: Low-Dimensional Systems and Nanostructures
JF - Physica E: Low-Dimensional Systems and Nanostructures
IS - 3-4 SPEC. ISS.
T2 - Proceedings of the Fifth International Workshop on Expitaxial
Y2 - 13 October 2003 through 15 October 2003
ER -