Nitrogen and titanium plasmas were induced by a carbon shunting arc discharge. The carbon shunting arc was produced with a carbon rod which was held vertically between a pair of titanium plane electrodes. A pair of the titanium plane electrodes was used to generate the titanium-containing plasma. Nitrogen gas was injected around the carbon rod to produce nitrogen-containing plasma. A blue light emission was observed from the plasma induced by the carbon shunting arc without nitrogen gas injection. The color of the plasma changed to purple with the injection of nitrogen gas at 10-Pa gas pressure. It was confirmed from a spectroscopic observation that the produced plasma contained carbon and titanium ions without nitrogen injection. The spectra of nitrogen species were also confirmed by injecting nitrogen at 10-Pa gas pressure.
- Plasma-based ion implantation
- shunting arc
- titanium ion