Influence of Al2O3 layer insertion on the electrical properties of Ga-In-Zn-O thin-film transistors

Kazunori Kurishima, Toshihide Nabatame, Maki Shimizu, Nobuhiko Mitoma, Takio Kizu, Shinya Aikawa, Kazuhito Tsukagoshi, Akihiko Ohi, Toyohiro Chikyow, Atsushi Ogura

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10 Citations (Scopus)


To investigate the influence of ionic/covalent interface of Al2O3/SiO2 gate insulator on the electrical properties of thin-film transistors (TFTs) with ionic Ga-In-Zn-O (GIZO) semiconducting channel layers, Al2O3 layers of different thickness were introduced between SiO2 and GIZO using plasma-enhanced atomic layer deposition. The GIZO layers were obtained by DC magnetron sputtering using a GIZO target (Ga:In:Zn = 1:1:1 mol. %). The GIZO TFTs with an Al2O3/SiO2 gate insulator exhibited positive threshold voltage (Vth) shift (about 1.1 V), Vth hysteresis suppression (0.23 V), and electron mobility degradation (about 13%) compared with those of a GIZO TFT with SiO2 gate insulator by the influence of ionic/ionic and ionic/covalent interface at Al2O3/GIZO and Al2O3/SiO2, respectively. To clarify the origin of the positive Vth shift, the authors estimated the shifts of flatband voltage (0.4 V) due to the dipole and the fixed charge (-1.1 × 1011/cm2) at Al2O3/SiO2 interface, from capacitance-voltage data for Pt/Al2O3/SiO2/p-Si capacitors. Based on these experimental data, the authors found that the positive Vth shift (1.1 V) could be divided into three components: the dipole (-0.4 V) and fixed charge (0.15 V) at the SiO2/Al2O3 interface, and the fixed charge (1.35 V) at the Al2O3/GIZO interface. Finally, it is noted that heterointerface of SiO2/Al2O3/GIZO stacks is important not only to recognize mechanism of Vth shift but also to design future TFTs with high-k dielectrics and low operating voltage.

Original languageEnglish
Article number061506
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number6
Publication statusPublished - 2015 Nov 1
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films


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