Abstract
In this paper, we studied the influence of deposition angle during the aerosol deposition (AD) method. The deposition angle was changed from 0° to 45°. The density of films did not change, but the surface roughness was improved by the inclination of deposition angle. This tendency was considered as one of advantages in manufacture of film magnets. However, the magnetization measured along the direction perpendicular to the film plane was decreased by the inclination. Referring to our previous work that the c-axis in Sm-Fe-N AD films has a tendency to align in the direction perpendicular to the film plane, it is satisfactory to consider that the increase in deposition angle weakened the alignment of c-axis.
Original language | English |
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Pages (from-to) | 1409-1412 |
Number of pages | 4 |
Journal | Journal of Alloys and Compounds |
Volume | 408-412 |
DOIs | |
Publication status | Published - 2006 Feb 9 |
Event | Proceedings of the Rare Earths'04 in Nara, Japan - Duration: 2004 Nov 7 → 2004 Nov 12 |
Keywords
- Aerosol deposition
- Permanent magnets
- Remanence
- Sm-Fe-N
- Surface roughness