TY - JOUR
T1 - Integrated X-Band Inductor with a Nanoferrite Film Core
AU - Sai, Ranajit
AU - Kulkarni, Suresh D.
AU - Yamaguchi, Masahiro
AU - Bhat, Navakanta
AU - Shivashankar, S. A.
N1 - Publisher Copyright:
© 2010-2012 IEEE.
PY - 2017
Y1 - 2017
N2 - The performance of an on-chip X-band (8-12 GHz) inductor, integrated with a partially-inverted zinc ferrite (piZF) film, is presented. The ferrite-core inductor is realized in three steps - first, fabrication of an uncoated spiral inductor via a 130 nm Si-CMOS process in a foundry, followed by passivation removal around the coil by reactive ion etching (RIE), and finally, deposition of piZF directly on the coil by microwave-assisted solution-based processing. The resulting piZF film covers the inductor coil conformally and exhibits high saturation magnetization (MS=130 emu/cm3 and very low coercivity (HC < 15 Oe) at room temperature. The ferromagnetic resonance frequency (fFMR) of piZF was determined by the coplanar-waveguide ferromagnetic-resonance technique to be ∼sim30 GHz, well above the frequency of targeted X-band applications. The inductance-density and Q-factor of the piZF-coated inductor are enhanced by 13% and 25% to 450 nH/mm2 and 5.8, respectively, at 10 GHz. This is the first report of an on-chip ferrite-core RF inductor operating above 6 GHz.
AB - The performance of an on-chip X-band (8-12 GHz) inductor, integrated with a partially-inverted zinc ferrite (piZF) film, is presented. The ferrite-core inductor is realized in three steps - first, fabrication of an uncoated spiral inductor via a 130 nm Si-CMOS process in a foundry, followed by passivation removal around the coil by reactive ion etching (RIE), and finally, deposition of piZF directly on the coil by microwave-assisted solution-based processing. The resulting piZF film covers the inductor coil conformally and exhibits high saturation magnetization (MS=130 emu/cm3 and very low coercivity (HC < 15 Oe) at room temperature. The ferromagnetic resonance frequency (fFMR) of piZF was determined by the coplanar-waveguide ferromagnetic-resonance technique to be ∼sim30 GHz, well above the frequency of targeted X-band applications. The inductance-density and Q-factor of the piZF-coated inductor are enhanced by 13% and 25% to 450 nH/mm2 and 5.8, respectively, at 10 GHz. This is the first report of an on-chip ferrite-core RF inductor operating above 6 GHz.
KW - high-frequency applications
KW - inductors
KW - Microwave magnetics
KW - soft magnetic materials
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U2 - 10.1109/LMAG.2017.2655495
DO - 10.1109/LMAG.2017.2655495
M3 - Article
AN - SCOPUS:85017617125
SN - 1949-307X
VL - 8
JO - IEEE Magnetics Letters
JF - IEEE Magnetics Letters
M1 - 7826968
ER -