@conference{25fc8bf8e61b44ef99f489bb278086c5,
title = "Integration and fabrication of PZT and metallic glass films for micro-mirror device",
author = "Tsai, {Yao Chuan} and Lee, {Jae Wung} and Takayuki Naono and Ikusei Rin and Masayoshi Esashi and Takamichi Fujii and Thomas Gessner",
note = "Funding Information: This work is partly supported by Micro System Integration Center (μSIC) and Japan Science and Technology Agency. The authors appreciate the collaboration from the WPI Advanced Institute for Materials Research of Tohoku University.; Smart Systems Integration Conference 2013 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2013 ; Conference date: 13-03-2013 Through 14-03-2013",
year = "2013",
language = "English",
}