Integration of diamond microelectrodes on CMOS-based amperometric biosensor array by film transfer technology

Takeshi Hayasaka; Shinya Yoshida; Kumi Y. Inoue; Masanori Nakano; Tomohiro Ishikawa; Tomokazu Matsue; Masayoshi Esashi; Shuji Tanaka

doi:10.1109/MEMSYS.2014.6765641

Integration of diamond microelectrodes on CMOS-based amperometric biosensor array by film transfer technology

Takeshi Hayasaka, Shinya Yoshida, Kumi Y. Inoue, Masanori Nakano, Tomohiro Ishikawa, Tomokazu Matsue, Masayoshi Esashi, Shuji Tanaka

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Citations (Scopus)

Abstract

This paper reports a complementary metal oxide semiconductor (CMOS)-based 20×20 amperometric biosensor array using boron-doped diamond (BDD) microelectrodes with excellent electrochemical properties. The BDD electrodes were once formed on a Si wafer at 800°C, and then transferred to a 0.18 μm CMOS wafer with a benzocyclobutene (BCB) bonding interlayer. As a result, the BDD microelectrodes were arrayed without damage in the CMOS LSI circuit. The fully-integrated device could detect histamine and dopamine owing to a wide potential window of the BDD electrode, and offered 2-dimensional real-time imaging of histamine diffusion in a solution.

Original language	English
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	322-325
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765641
Publication status	Published - 2014
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States Duration: 2014 Jan 26 → 2014 Jan 30

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/Territory	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

Access to Document

10.1109/MEMSYS.2014.6765641

Cite this

Hayasaka, T., Yoshida, S., Inoue, K. Y., Nakano, M., Ishikawa, T., Matsue, T., Esashi, M., & Tanaka, S. (2014). Integration of diamond microelectrodes on CMOS-based amperometric biosensor array by film transfer technology. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 322-325). Article 6765641 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765641

Hayasaka, Takeshi ; Yoshida, Shinya ; Inoue, Kumi Y. et al. / Integration of diamond microelectrodes on CMOS-based amperometric biosensor array by film transfer technology. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 322-325 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{0ed458926d674c73bad188e98de2a8b5,

title = "Integration of diamond microelectrodes on CMOS-based amperometric biosensor array by film transfer technology",

abstract = "This paper reports a complementary metal oxide semiconductor (CMOS)-based 20×20 amperometric biosensor array using boron-doped diamond (BDD) microelectrodes with excellent electrochemical properties. The BDD electrodes were once formed on a Si wafer at 800°C, and then transferred to a 0.18 μm CMOS wafer with a benzocyclobutene (BCB) bonding interlayer. As a result, the BDD microelectrodes were arrayed without damage in the CMOS LSI circuit. The fully-integrated device could detect histamine and dopamine owing to a wide potential window of the BDD electrode, and offered 2-dimensional real-time imaging of histamine diffusion in a solution.",

author = "Takeshi Hayasaka and Shinya Yoshida and Inoue, {Kumi Y.} and Masanori Nakano and Tomohiro Ishikawa and Tomokazu Matsue and Masayoshi Esashi and Shuji Tanaka",

year = "2014",

doi = "10.1109/MEMSYS.2014.6765641",

language = "English",

isbn = "9781479935086",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "322--325",

booktitle = "MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems",

address = "United States",

note = "27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 ; Conference date: 26-01-2014 Through 30-01-2014",

}

Hayasaka, T, Yoshida, S, Inoue, KY, Nakano, M, Ishikawa, T, Matsue, T, Esashi, M & Tanaka, S 2014, Integration of diamond microelectrodes on CMOS-based amperometric biosensor array by film transfer technology. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765641, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 322-325, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765641

Integration of diamond microelectrodes on CMOS-based amperometric biosensor array by film transfer technology. / Hayasaka, Takeshi; Yoshida, Shinya; Inoue, Kumi Y. et al.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 322-325 6765641 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Integration of diamond microelectrodes on CMOS-based amperometric biosensor array by film transfer technology

AU - Hayasaka, Takeshi

AU - Yoshida, Shinya

AU - Inoue, Kumi Y.

AU - Nakano, Masanori

AU - Ishikawa, Tomohiro

AU - Matsue, Tomokazu

AU - Esashi, Masayoshi

AU - Tanaka, Shuji

PY - 2014

Y1 - 2014

N2 - This paper reports a complementary metal oxide semiconductor (CMOS)-based 20×20 amperometric biosensor array using boron-doped diamond (BDD) microelectrodes with excellent electrochemical properties. The BDD electrodes were once formed on a Si wafer at 800°C, and then transferred to a 0.18 μm CMOS wafer with a benzocyclobutene (BCB) bonding interlayer. As a result, the BDD microelectrodes were arrayed without damage in the CMOS LSI circuit. The fully-integrated device could detect histamine and dopamine owing to a wide potential window of the BDD electrode, and offered 2-dimensional real-time imaging of histamine diffusion in a solution.

AB - This paper reports a complementary metal oxide semiconductor (CMOS)-based 20×20 amperometric biosensor array using boron-doped diamond (BDD) microelectrodes with excellent electrochemical properties. The BDD electrodes were once formed on a Si wafer at 800°C, and then transferred to a 0.18 μm CMOS wafer with a benzocyclobutene (BCB) bonding interlayer. As a result, the BDD microelectrodes were arrayed without damage in the CMOS LSI circuit. The fully-integrated device could detect histamine and dopamine owing to a wide potential window of the BDD electrode, and offered 2-dimensional real-time imaging of histamine diffusion in a solution.

UR - http://www.scopus.com/inward/record.url?scp=84898954812&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84898954812&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2014.6765641

DO - 10.1109/MEMSYS.2014.6765641

M3 - Conference contribution

AN - SCOPUS:84898954812

SN - 9781479935086

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 322

EP - 325

BT - MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014

Y2 - 26 January 2014 through 30 January 2014

ER -

Hayasaka T, Yoshida S, Inoue KY, Nakano M, Ishikawa T, Matsue T et al. Integration of diamond microelectrodes on CMOS-based amperometric biosensor array by film transfer technology. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 322-325. 6765641. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765641

Integration of diamond microelectrodes on CMOS-based amperometric biosensor array by film transfer technology

Abstract

Publication series

Conference

Access to Document

Other files and links

Fingerprint

Cite this