A bridge-connected high-frequency carrier-type thin-film magnetic field sensor is fabricated on a SmCo magnetic thin-film which provides an in-plane dc bias magnetic field to the sensor. The dc bias field of 320 A/m was achieved by using a 3 imi thick SmCo underlayer. The sensitivity obtained was 8. 4 mV/Oe which was 12 times as large as the sensitivity without the SmCo thin-film magnet.
- Gmi sensor
- Highfrequency carrier-type thin-film magnetic field sensor
- Non-uniform bridge-connected sensor
- Smco thin-film magnet