Integration of MEMS actuators with nanophotonics: Silicon submicron-wide waveguide switches for optical-path changes

Kazuhiro Hane; Yoshiaki Kanamori

Integration of MEMS actuators with nanophotonics: Silicon submicron-wide waveguide switches for optical-path changes

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

Integrating ultra-small actuators based on MEMS technology with silicon submiciron waveguides, several kinds of optical switches are studied, which include physical contact of waveguides, variable air-gap coupler, Mach-Zehnder interferometer, etc.

Original language	English
Title of host publication	16th Opto-Electronics and Communications Conference, OECC 2011
Pages	485-486
Number of pages	2
Publication status	Published - 2011
Event	16th Opto-Electronics and Communications Conference, OECC 2011 - Kaohsiung, Taiwan, Province of China Duration: 2011 Jul 4 → 2011 Jul 8

Publication series

Name	16th Opto-Electronics and Communications Conference, OECC 2011

Conference

Conference	16th Opto-Electronics and Communications Conference, OECC 2011
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	11/7/4 → 11/7/8

Cite this

@inproceedings{f04693af06864fcbb87a006259522564,

title = "Integration of MEMS actuators with nanophotonics: Silicon submicron-wide waveguide switches for optical-path changes",

abstract = "Integrating ultra-small actuators based on MEMS technology with silicon submiciron waveguides, several kinds of optical switches are studied, which include physical contact of waveguides, variable air-gap coupler, Mach-Zehnder interferometer, etc.",

author = "Kazuhiro Hane and Yoshiaki Kanamori",

year = "2011",

language = "English",

isbn = "9781612842882",

series = "16th Opto-Electronics and Communications Conference, OECC 2011",

pages = "485--486",

booktitle = "16th Opto-Electronics and Communications Conference, OECC 2011",

note = "16th Opto-Electronics and Communications Conference, OECC 2011 ; Conference date: 04-07-2011 Through 08-07-2011",

}

Hane, K & Kanamori, Y 2011, Integration of MEMS actuators with nanophotonics: Silicon submicron-wide waveguide switches for optical-path changes. in 16th Opto-Electronics and Communications Conference, OECC 2011., 6015224, 16th Opto-Electronics and Communications Conference, OECC 2011, pp. 485-486, 16th Opto-Electronics and Communications Conference, OECC 2011, Kaohsiung, Taiwan, Province of China, 11/7/4.

Integration of MEMS actuators with nanophotonics: Silicon submicron-wide waveguide switches for optical-path changes. / Hane, Kazuhiro ; Kanamori, Yoshiaki.
16th Opto-Electronics and Communications Conference, OECC 2011. 2011. p. 485-486 6015224 (16th Opto-Electronics and Communications Conference, OECC 2011).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Integration of MEMS actuators with nanophotonics

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AU - Hane, Kazuhiro

AU - Kanamori, Yoshiaki

PY - 2011

Y1 - 2011

N2 - Integrating ultra-small actuators based on MEMS technology with silicon submiciron waveguides, several kinds of optical switches are studied, which include physical contact of waveguides, variable air-gap coupler, Mach-Zehnder interferometer, etc.

AB - Integrating ultra-small actuators based on MEMS technology with silicon submiciron waveguides, several kinds of optical switches are studied, which include physical contact of waveguides, variable air-gap coupler, Mach-Zehnder interferometer, etc.

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M3 - Conference contribution

AN - SCOPUS:80053301898

SN - 9781612842882

T3 - 16th Opto-Electronics and Communications Conference, OECC 2011

SP - 485

EP - 486

BT - 16th Opto-Electronics and Communications Conference, OECC 2011

Y2 - 4 July 2011 through 8 July 2011

ER -

Integration of MEMS actuators with nanophotonics: Silicon submicron-wide waveguide switches for optical-path changes

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