Integration of QCMs for studying surface science within a microfluidic channel

Yousuke Itasaka, Matsuhiko Nishizawa, Takashi Abe

Research output: Contribution to journalArticlepeer-review


This paper reports integration of quartz-crystal microbalance (QCM) sensors on a monolithic quartz crystal plate without using microfabrication. The QCM sensor used for this study is specially developed for sensing within a microfluidic channel. In this study, the distance between QCMs was optimized by monitoring frequency change caused by a mass load onto a neighboring QCM. It was found that circular shape QCM is suitable for the integration. The optimized QCM array was used for monitoring an etching of a gold electrode of the QCM by electrochemically generated oxidant. The measured phenomenon is practically useful for the cleaning of an integrated sensor within a packaged microfluidic channel.

Original languageEnglish
JournalIEEJ Transactions on Sensors and Micromachines
Issue number12
Publication statusPublished - 2009 Dec 1


  • Cleaning
  • Integration
  • Microfluidic channel
  • QCM

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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