Interconnect and substrate structure for gigascale integration

Akihiro Morimoto, Koji Kotani, Shigetoshi Sugawa, Tadahiro Ohmi

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Signal wave propagation properties for a high-speed gigascale integration (GSI) system LSI featuring an operation frequency of more than 10 GHz have been analyzed and discussed by solving the cylindrical Maxwell's equations directly using a stacked coaxial structure. The results give us a good perspective and enable us to predict the ultrahigh-speed and miniaturized interconnect characteristics. The metal substrate structure is essential to suppress the substrate surface potential fluctuations and the substrate-induced signal attenuation and delay. The gas-isolated interconnect structure can effectively reduce the signal attenuation and delay. The combination of the gas-isolated interconnect and the metal substrate structure is the most promising solution for an interconnect and a substrate in GSI.

Original languageEnglish
Pages (from-to)3038-3043
Number of pages6
JournalJapanese Journal of Applied Physics
Issue number4 B
Publication statusPublished - 2001 Apr


  • Gas-isolated interconnect
  • Gigascale integration
  • Maxwell's equations
  • Metal substrate
  • Stacked coaxial structure


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