Intrinsic position sensing of a Ni-Mn-Ga microactuator

D. Auernhammer, M. Kohl, B. Krevet, M. Ohtsuka

Research output: Contribution to journalArticlepeer-review

12 Citations (Scopus)


This paper presents an investigation of the intrinsic magnetoresistance of a ferromagnetic shape memory alloy microactuator for position sensing. The microactuator is designed as a double-beam cantilever made of a polycrystalline Ni-Mn-Ga thin film, which exhibits both a martensitic transformation in the temperature range 333-359K and a ferromagnetic transition at about 370K. The microactuator is placed in the inhomogeneous magnetic field of a miniature Nd-Fe-B magnet causing a mixed thermo-magnetoresistance effect upon actuation. The maximum in-plane magnetic field is about 0.38T. In this case, the maximum magnetoresistance is 0.19%. Under these conditions, a maximum positioning accuracy of 18νm can be reached within the deflection system presented.

Original languageEnglish
Article number104016
JournalSmart Materials and Structures
Issue number10
Publication statusPublished - 2009


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