Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting

Qi Wang; Hiroyuki Oguchi; Motoaki Hara; Hiroki Kuwano

doi:10.1109/MEMSYS.2014.6765721

Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting

Qi Wang, Hiroyuki Oguchi, Motoaki Hara, Hiroki Kuwano

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

We investigated the experimental conditions affecting degree of c-axis tilt angle, which is related to output power of piezoelectric energy harvesters, of the oriented aluminum nitride (AlN) thin films grown using electron cyclotron resonance (ECR) sputtering. The c-axis tilt angle of the AlN thin films deposited on silicon (100) substrates was measured by X-ray diffractometry with a 2-dimenaioanl detector (2D XRD). This study verified that 1) lowering the incident angle of the flux during thin film growth and 2) lower substrate temperature, and 3) increasing the buffer layer roughness are effective ways to increase the c-axis tilt angle of the AlN thin films.

Original language	English
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	636-639
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765721
Publication status	Published - 2014
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States Duration: 2014 Jan 26 → 2014 Jan 30

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/Territory	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2014.6765721

Cite this

Wang, Q., Oguchi, H., Hara, M., & Kuwano, H. (2014). Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 636-639). [6765721] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765721

Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting. / Wang, Qi; Oguchi, Hiroyuki; Hara, Motoaki et al.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 636-639 6765721 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Wang, Q, Oguchi, H, Hara, M & Kuwano, H 2014, Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765721, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 636-639, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765721

Wang Q, Oguchi H, Hara M, Kuwano H. Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 636-639. 6765721. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765721

Wang, Qi ; Oguchi, Hiroyuki ; Hara, Motoaki et al. / Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 636-639 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "We investigated the experimental conditions affecting degree of c-axis tilt angle, which is related to output power of piezoelectric energy harvesters, of the oriented aluminum nitride (AlN) thin films grown using electron cyclotron resonance (ECR) sputtering. The c-axis tilt angle of the AlN thin films deposited on silicon (100) substrates was measured by X-ray diffractometry with a 2-dimenaioanl detector (2D XRD). This study verified that 1) lowering the incident angle of the flux during thin film growth and 2) lower substrate temperature, and 3) increasing the buffer layer roughness are effective ways to increase the c-axis tilt angle of the AlN thin films.",

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series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting

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