TY - JOUR
T1 - Investigation of Pulsed Laser-Deposited Al2O3 as a high pH-sensitive layer for LAPS-based biosensing applications
AU - Ismail, Abu Bakar Md
AU - Harada, Tetsuro
AU - Yoshinobu, Tatsuo
AU - Iwasaki, Hiroshi
AU - Schöning, M. J.
AU - Lüth, H.
N1 - Funding Information:
The authors of Osaka University would like to thank the New Energy and Industrial Technology Development Organization (NEDO), Japan, for supporting this work (contract number 98S18-001). The authors of the Research Center Jülich gratefully thank A. Montsch, J. Schubert and W. Zander for technical support and valuable discussions.
PY - 2000/12/1
Y1 - 2000/12/1
N2 - In this work Pulsed Laser-Deposited (PLD) Al2O3 has been investigated as an alternative high pH-sensitive layer for light-addressable potentiometric sensors (LAPS). Al2O3 has been reported to be better in pH sensitivity and long-term drift of the sensitivity over Si3N4 in ISFET-based biosensors. In this work the possibility of using pulsed laser-deposited Al2O3 as pH-sensitive layer for the LAPS instruments is presented. Initially an average pH-sensitivity of above 57 mV/pH has been observed. After a couple of weeks the sensitivity reduces to about 56.3 mV/pH. The observed sensitivity agrees with the reported sensitivity in ISFET-based sensor devices. The sensor response has been found quite linear with the pH value. The pH sensitivity was measured for several weeks and a low drift was found in the long-term use that shows the possibility of using PLD Al2O3 as the high and stable pH-sensitive layer for LAPS-based biosensors.
AB - In this work Pulsed Laser-Deposited (PLD) Al2O3 has been investigated as an alternative high pH-sensitive layer for light-addressable potentiometric sensors (LAPS). Al2O3 has been reported to be better in pH sensitivity and long-term drift of the sensitivity over Si3N4 in ISFET-based biosensors. In this work the possibility of using pulsed laser-deposited Al2O3 as pH-sensitive layer for the LAPS instruments is presented. Initially an average pH-sensitivity of above 57 mV/pH has been observed. After a couple of weeks the sensitivity reduces to about 56.3 mV/pH. The observed sensitivity agrees with the reported sensitivity in ISFET-based sensor devices. The sensor response has been found quite linear with the pH value. The pH sensitivity was measured for several weeks and a low drift was found in the long-term use that shows the possibility of using PLD Al2O3 as the high and stable pH-sensitive layer for LAPS-based biosensors.
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U2 - 10.1016/S0925-4005(99)00380-9
DO - 10.1016/S0925-4005(99)00380-9
M3 - Article
AN - SCOPUS:0034501751
SN - 0925-4005
VL - 71
SP - 169
EP - 172
JO - Sensors and Actuators B: Chemical
JF - Sensors and Actuators B: Chemical
IS - 3
ER -