Abstract
This paper reports the theoretical and experimental investigations on the strain sensing effect of a two dimensions (2D) photonic crystal (PhC) nanocavity resonator. By using the finite element method (FEM) and finite difference time domain (FDTD) simulations, the strain sensitivity of a high quality factor PhC nanocavity was calculated. Linear relationships between the applied strain and the shift in the resonant wavelength of the cavity were obtained. A single-defect silicon (Si) PhC cavity was fabricated, and measurements of the strain sensitivity were performed. Good agreement between the experimental and simulation results was observed.
Original language | English |
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Pages (from-to) | 8821-8829 |
Number of pages | 9 |
Journal | Optics Express |
Volume | 19 |
Issue number | 9 |
DOIs | |
Publication status | Published - 2011 Apr 25 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics