Investigation of surface-acoustic-wave atomization using phase Doppler anemometry

Taiki Hirotomto; Motoaki Hara; Hiroki Kuwano; Taku Kudo; Hideaki Kobayashi

doi:10.1109/ULTSYM.2015.0524

Investigation of surface-acoustic-wave atomization using phase Doppler anemometry

Taiki Hirotomto, Motoaki Hara, Hiroki Kuwano, Taku Kudo, Hideaki Kobayashi

IFS - Institute of Fluid Science (institute affiliation only)

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We developed surface acoustic wave (SAW) based atomizers. In our device, three functions, which were micro-pumps, a trench with a tank to feed and regulate the liquid, and faced arc-shaped interdigital transducers (AS-IDT) for atomization, were integrated on the surface of a piezoelectric chip (LiNbO₃). Directional point source atomization was achieved by exploiting the integrated trench and AS-IDTs. Also, as a result of evaluations with laser phase Doppler anemometry (PDA), distribution of the droplet diameter was monodisperse, and mean diameter, volume and velocity droplets were 14.0 μm, 1.4 pl, and 0.29 m/s, respectively, when applying acetone to the liquid for atomization.

Original language	English
Title of host publication	2015 IEEE International Ultrasonics Symposium, IUS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781479981823
DOIs	https://doi.org/10.1109/ULTSYM.2015.0524
Publication status	Published - 2015 Nov 13
Event	IEEE International Ultrasonics Symposium, IUS 2015 - Taipei, Taiwan, Province of China Duration: 2015 Oct 21 → 2015 Oct 24

Publication series

Name	2015 IEEE International Ultrasonics Symposium, IUS 2015

Conference

Conference	IEEE International Ultrasonics Symposium, IUS 2015
Country/Territory	Taiwan, Province of China
City	Taipei
Period	15/10/21 → 15/10/24

Keywords

atomization
fluidic device
MEMS
PDA
SAW

Access to Document

10.1109/ULTSYM.2015.0524

Cite this

Hirotomto, T., Hara, M., Kuwano, H., Kudo, T., & Kobayashi, H. (2015). Investigation of surface-acoustic-wave atomization using phase Doppler anemometry. In 2015 IEEE International Ultrasonics Symposium, IUS 2015 Article 7329198 (2015 IEEE International Ultrasonics Symposium, IUS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ULTSYM.2015.0524

@inproceedings{e66e669478cc48c29d2478d7f215866b,

title = "Investigation of surface-acoustic-wave atomization using phase Doppler anemometry",

abstract = "We developed surface acoustic wave (SAW) based atomizers. In our device, three functions, which were micro-pumps, a trench with a tank to feed and regulate the liquid, and faced arc-shaped interdigital transducers (AS-IDT) for atomization, were integrated on the surface of a piezoelectric chip (LiNbO3). Directional point source atomization was achieved by exploiting the integrated trench and AS-IDTs. Also, as a result of evaluations with laser phase Doppler anemometry (PDA), distribution of the droplet diameter was monodisperse, and mean diameter, volume and velocity droplets were 14.0 μm, 1.4 pl, and 0.29 m/s, respectively, when applying acetone to the liquid for atomization.",

keywords = "atomization, fluidic device, MEMS, PDA, SAW",

author = "Taiki Hirotomto and Motoaki Hara and Hiroki Kuwano and Taku Kudo and Hideaki Kobayashi",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; IEEE International Ultrasonics Symposium, IUS 2015 ; Conference date: 21-10-2015 Through 24-10-2015",

year = "2015",

month = nov,

day = "13",

doi = "10.1109/ULTSYM.2015.0524",

language = "English",

series = "2015 IEEE International Ultrasonics Symposium, IUS 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2015 IEEE International Ultrasonics Symposium, IUS 2015",

address = "United States",

}

Hirotomto, T, Hara, M, Kuwano, H, Kudo, T & Kobayashi, H 2015, Investigation of surface-acoustic-wave atomization using phase Doppler anemometry. in 2015 IEEE International Ultrasonics Symposium, IUS 2015., 7329198, 2015 IEEE International Ultrasonics Symposium, IUS 2015, Institute of Electrical and Electronics Engineers Inc., IEEE International Ultrasonics Symposium, IUS 2015, Taipei, Taiwan, Province of China, 15/10/21. https://doi.org/10.1109/ULTSYM.2015.0524

Investigation of surface-acoustic-wave atomization using phase Doppler anemometry. / Hirotomto, Taiki; Hara, Motoaki; Kuwano, Hiroki et al.
2015 IEEE International Ultrasonics Symposium, IUS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 7329198 (2015 IEEE International Ultrasonics Symposium, IUS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Investigation of surface-acoustic-wave atomization using phase Doppler anemometry

AU - Hirotomto, Taiki

AU - Hara, Motoaki

AU - Kuwano, Hiroki

AU - Kudo, Taku

AU - Kobayashi, Hideaki

PY - 2015/11/13

Y1 - 2015/11/13

N2 - We developed surface acoustic wave (SAW) based atomizers. In our device, three functions, which were micro-pumps, a trench with a tank to feed and regulate the liquid, and faced arc-shaped interdigital transducers (AS-IDT) for atomization, were integrated on the surface of a piezoelectric chip (LiNbO3). Directional point source atomization was achieved by exploiting the integrated trench and AS-IDTs. Also, as a result of evaluations with laser phase Doppler anemometry (PDA), distribution of the droplet diameter was monodisperse, and mean diameter, volume and velocity droplets were 14.0 μm, 1.4 pl, and 0.29 m/s, respectively, when applying acetone to the liquid for atomization.

AB - We developed surface acoustic wave (SAW) based atomizers. In our device, three functions, which were micro-pumps, a trench with a tank to feed and regulate the liquid, and faced arc-shaped interdigital transducers (AS-IDT) for atomization, were integrated on the surface of a piezoelectric chip (LiNbO3). Directional point source atomization was achieved by exploiting the integrated trench and AS-IDTs. Also, as a result of evaluations with laser phase Doppler anemometry (PDA), distribution of the droplet diameter was monodisperse, and mean diameter, volume and velocity droplets were 14.0 μm, 1.4 pl, and 0.29 m/s, respectively, when applying acetone to the liquid for atomization.

KW - atomization

KW - fluidic device

KW - MEMS

KW - PDA

KW - SAW

UR - http://www.scopus.com/inward/record.url?scp=84962013253&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84962013253&partnerID=8YFLogxK

U2 - 10.1109/ULTSYM.2015.0524

DO - 10.1109/ULTSYM.2015.0524

M3 - Conference contribution

AN - SCOPUS:84962013253

T3 - 2015 IEEE International Ultrasonics Symposium, IUS 2015

BT - 2015 IEEE International Ultrasonics Symposium, IUS 2015

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - IEEE International Ultrasonics Symposium, IUS 2015

Y2 - 21 October 2015 through 24 October 2015

ER -

Investigation of surface-acoustic-wave atomization using phase Doppler anemometry

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this