TY - JOUR
T1 - Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer
AU - Cai, Yindi
AU - Li, Xinghui
AU - Aihara, Ryo
AU - Zongwei, Ren
AU - Shimizu, Yuki
AU - Ito, So
AU - Gao, Wei
N1 - Publisher Copyright:
© 2016 The Japan Society of Mechanical Engineers.
PY - 2016
Y1 - 2016
N2 - This paper presents a design study of an optical configuration for the fabrication of a two-dimensional grating, which will be used as a scale in a planar encoder system. For the modified two-axis Lloyd's mirror interferometer, in which major modifications have been made to the conventional one-axis Lloyd's mirror interferometer, computer simulation is carried out based on wave optics. Three-dimensional light intensity distributions of the fringe patterns are calculated to investigate the effect of the polarization modulation. In addition, a relationship between the asymmetry of the cross-sectional profiles of the grating pattern structures and the designed grating pattern period is also investigated. Furthermore, pattern exposure tests have been carried out by using a prototype optical setup for the modified two-axis Lloyd's mirror interferometer.
AB - This paper presents a design study of an optical configuration for the fabrication of a two-dimensional grating, which will be used as a scale in a planar encoder system. For the modified two-axis Lloyd's mirror interferometer, in which major modifications have been made to the conventional one-axis Lloyd's mirror interferometer, computer simulation is carried out based on wave optics. Three-dimensional light intensity distributions of the fringe patterns are calculated to investigate the effect of the polarization modulation. In addition, a relationship between the asymmetry of the cross-sectional profiles of the grating pattern structures and the designed grating pattern period is also investigated. Furthermore, pattern exposure tests have been carried out by using a prototype optical setup for the modified two-axis Lloyd's mirror interferometer.
KW - Grating
KW - Interference lithography
KW - Lloyd's mirror interferometer
KW - Micro patterns
KW - Wave optics
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U2 - 10.1299/jamdsm.2016jamdsm0080
DO - 10.1299/jamdsm.2016jamdsm0080
M3 - Article
AN - SCOPUS:84989267409
SN - 1881-3054
VL - 10
JO - Journal of Advanced Mechanical Design, Systems and Manufacturing
JF - Journal of Advanced Mechanical Design, Systems and Manufacturing
IS - 5
ER -