Microfocusing optics with total reflection mirrors has been constructed, and a performance test in the hard x-ray region has been carried out. The material of the mirror is fused quartz, and parabolic surface figures are fabricated by the bent-polishing method. The reflective surface is coated with platinum. By configuring two parabolic mirrors in the Kirkpatrick-Baez optics, a focused beam size of 150 nm in the vertical direction ×110 nm in the horizontal direction has been achieved at an x-ray energy of 12 keV. A focused beam size of smaller than 300 nm is obtained within an x-ray energy range of 8-28 keV. In a performance test of the scanning microscope, fine periodic structures with a line pitch of 140 nm are clearly resolved. Diffraction limit and modulation transfer function of these focusing optics are discussed.
|Journal||Review of Scientific Instruments|
|Publication status||Published - 2005 Sept|
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