Kirkpatrick-Baez type x-ray focusing mirror fabricated by the bent-polishing method

Akihisa Takeuchi; Yoshio Suzuki; Hidekazu Takano; Yasuko Terada

doi:10.1063/1.2052595

Kirkpatrick-Baez type x-ray focusing mirror fabricated by the bent-polishing method

Akihisa Takeuchi, Yoshio Suzuki, Hidekazu Takano, Yasuko Terada

Research output: Contribution to journal › Article › peer-review

28 Citations (Scopus)

Abstract

Microfocusing optics with total reflection mirrors has been constructed, and a performance test in the hard x-ray region has been carried out. The material of the mirror is fused quartz, and parabolic surface figures are fabricated by the bent-polishing method. The reflective surface is coated with platinum. By configuring two parabolic mirrors in the Kirkpatrick-Baez optics, a focused beam size of 150 nm in the vertical direction ×110 nm in the horizontal direction has been achieved at an x-ray energy of 12 keV. A focused beam size of smaller than 300 nm is obtained within an x-ray energy range of 8-28 keV. In a performance test of the scanning microscope, fine periodic structures with a line pitch of 140 nm are clearly resolved. Diffraction limit and modulation transfer function of these focusing optics are discussed.

Original language	English
Article number	093708
Journal	Review of Scientific Instruments
Volume	76
Issue number	9
DOIs	https://doi.org/10.1063/1.2052595
Publication status	Published - 2005 Sept
Externally published	Yes

ASJC Scopus subject areas

Instrumentation

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10.1063/1.2052595

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title = "Kirkpatrick-Baez type x-ray focusing mirror fabricated by the bent-polishing method",

abstract = "Microfocusing optics with total reflection mirrors has been constructed, and a performance test in the hard x-ray region has been carried out. The material of the mirror is fused quartz, and parabolic surface figures are fabricated by the bent-polishing method. The reflective surface is coated with platinum. By configuring two parabolic mirrors in the Kirkpatrick-Baez optics, a focused beam size of 150 nm in the vertical direction ×110 nm in the horizontal direction has been achieved at an x-ray energy of 12 keV. A focused beam size of smaller than 300 nm is obtained within an x-ray energy range of 8-28 keV. In a performance test of the scanning microscope, fine periodic structures with a line pitch of 140 nm are clearly resolved. Diffraction limit and modulation transfer function of these focusing optics are discussed.",

author = "Akihisa Takeuchi and Yoshio Suzuki and Hidekazu Takano and Yasuko Terada",

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doi = "10.1063/1.2052595",

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T1 - Kirkpatrick-Baez type x-ray focusing mirror fabricated by the bent-polishing method

AU - Takeuchi, Akihisa

AU - Suzuki, Yoshio

AU - Takano, Hidekazu

AU - Terada, Yasuko

PY - 2005/9

Y1 - 2005/9

N2 - Microfocusing optics with total reflection mirrors has been constructed, and a performance test in the hard x-ray region has been carried out. The material of the mirror is fused quartz, and parabolic surface figures are fabricated by the bent-polishing method. The reflective surface is coated with platinum. By configuring two parabolic mirrors in the Kirkpatrick-Baez optics, a focused beam size of 150 nm in the vertical direction ×110 nm in the horizontal direction has been achieved at an x-ray energy of 12 keV. A focused beam size of smaller than 300 nm is obtained within an x-ray energy range of 8-28 keV. In a performance test of the scanning microscope, fine periodic structures with a line pitch of 140 nm are clearly resolved. Diffraction limit and modulation transfer function of these focusing optics are discussed.

AB - Microfocusing optics with total reflection mirrors has been constructed, and a performance test in the hard x-ray region has been carried out. The material of the mirror is fused quartz, and parabolic surface figures are fabricated by the bent-polishing method. The reflective surface is coated with platinum. By configuring two parabolic mirrors in the Kirkpatrick-Baez optics, a focused beam size of 150 nm in the vertical direction ×110 nm in the horizontal direction has been achieved at an x-ray energy of 12 keV. A focused beam size of smaller than 300 nm is obtained within an x-ray energy range of 8-28 keV. In a performance test of the scanning microscope, fine periodic structures with a line pitch of 140 nm are clearly resolved. Diffraction limit and modulation transfer function of these focusing optics are discussed.

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Kirkpatrick-Baez type x-ray focusing mirror fabricated by the bent-polishing method

Abstract

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