Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range

Takashi Imazono; Masato Koike; Tetsuya Kawachi; Noboru Hasegawa; Masaru Koeda; Tetsuya Nagano; Hiroyuki Sasai; Yuki Oue; Zeno Yonezawa; Satoshi Kuramoto; Masami Terauchi; Hideyuki Takahashi; Nobuo Handa; Takanori Murano; Kazuo Sano

doi:10.1364/AO.51.002351

Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range

Takashi Imazono, Masato Koike, Tetsuya Kawachi, Noboru Hasegawa, Masaru Koeda, Tetsuya Nagano, Hiroyuki Sasai, Yuki Oue, Zeno Yonezawa, Satoshi Kuramoto, Masami Terauchi, Hideyuki Takahashi, Nobuo Handa, Takanori Murano, Kazuo Sano

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

Laminar and blazed type holographic varied-line-spacing spherical gratings for use in a versatile soft x-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at 86.00 incidence evaluated by synchrotron radiation show over 5% (or 8%) in the 50-200 eV range with the maxima of 22% (or 26%-27%). Also the resolving power evaluated by a laser produced plasma source is in excess of 700 at the energy near the K emission spectrum of lithium (̃55 eV) for all gratings. Moreover, the K emission spectrum of metallic Li with high spectral resolution is successfully observed with the spectrograph attached to a transmission electron microscope.

Original language	English
Pages (from-to)	2351-2360
Number of pages	10
Journal	Applied optics
Volume	51
Issue number	13
DOIs	https://doi.org/10.1364/AO.51.002351
Publication status	Published - 2012 May 1

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Engineering (miscellaneous)
Electrical and Electronic Engineering

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Imazono, T., Koike, M., Kawachi, T., Hasegawa, N., Koeda, M., Nagano, T., Sasai, H., Oue, Y., Yonezawa, Z., Kuramoto, S., Terauchi, M., Takahashi, H., Handa, N., Murano, T., & Sano, K. (2012). Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range. Applied optics, 51(13), 2351-2360. https://doi.org/10.1364/AO.51.002351

Imazono, T, Koike, M, Kawachi, T, Hasegawa, N, Koeda, M, Nagano, T, Sasai, H, Oue, Y, Yonezawa, Z, Kuramoto, S, Terauchi, M, Takahashi, H, Handa, N, Murano, T & Sano, K 2012, 'Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range', Applied optics, vol. 51, no. 13, pp. 2351-2360. https://doi.org/10.1364/AO.51.002351

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abstract = "Laminar and blazed type holographic varied-line-spacing spherical gratings for use in a versatile soft x-ray flat-field spectrograph attached to an electron microscope are designed, fabricated, and evaluated. The absolute diffraction efficiencies of laminar (or blazed) master and replica gratings at 86.00 incidence evaluated by synchrotron radiation show over 5% (or 8%) in the 50-200 eV range with the maxima of 22% (or 26%-27%). Also the resolving power evaluated by a laser produced plasma source is in excess of 700 at the energy near the K emission spectrum of lithium {\~(}55 eV) for all gratings. Moreover, the K emission spectrum of metallic Li with high spectral resolution is successfully observed with the spectrograph attached to a transmission electron microscope.",

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AU - Imazono, Takashi

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AU - Kawachi, Tetsuya

AU - Hasegawa, Noboru

AU - Koeda, Masaru

AU - Nagano, Tetsuya

AU - Sasai, Hiroyuki

AU - Oue, Yuki

AU - Yonezawa, Zeno

AU - Kuramoto, Satoshi

AU - Terauchi, Masami

AU - Takahashi, Hideyuki

AU - Handa, Nobuo

AU - Murano, Takanori

AU - Sano, Kazuo

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Laminar and blazed type holographic gratings for a versatile soft x-ray spectrograph attached to an electron microscope and their evaluation in the 50-200 eV range

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