Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar

Minoru Sasaki, Shinya Yuki, Kazuhiro Hane

Research output: Contribution to journalArticlepeer-review

17 Citations (Scopus)

Abstract

An electrostatically driven micromirror device using a thin-film torsion bar is proposed. The mirror rotation angle of 7.3° at 5 V is demonstrated at the nonresonant condition. A bulk Si micromirror is suspended by SiN thin-film torsion bars. Inside the torsion bar, the tension having the magnitude larger than that of the driving force is included. The torsion bar can have a compliance with the mirror rotation and the rigidity against the unwanted motions (e.g., vertical displacement or in-plane rotation).

Original languageEnglish
Pages (from-to)1573-1575
Number of pages3
JournalIEEE Photonics Technology Letters
Volume18
Issue number15
DOIs
Publication statusPublished - 2006 Aug 1

Keywords

  • Electrostatic driving
  • Low-voltage driving
  • Micromirror
  • Tension
  • Thin-film torsion bar

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