Laser microfabrication of metal surfaces by tightly focused higher-order vector beams

Masaki Sato; Yuichi Kozawa; Shunichi Sato

doi:10.1364/CLEO_SI.2020.STh3H.2

Laser microfabrication of metal surfaces by tightly focused higher-order vector beams

Masaki Sato, Yuichi Kozawa, Shunichi Sato

IMRAM - Division of Process and System Engineering

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We present an experimental study on laser microfabrication of metal surfaces by using femtosecond, higher-order vector beams. The contribution of the longitudinal electric field in laser ablation depends on target material.

Original language	English
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations, CLEO_SI 2020
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580767
DOIs	https://doi.org/10.1364/CLEO_SI.2020.STh3H.2
Publication status	Published - 2020
Event	CLEO: Science and Innovations, CLEO_SI 2020 - Washington, United States Duration: 2020 May 10 → 2020 May 15

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F183-CLEO-SI 2020
ISSN (Electronic)	2162-2701

Conference

Conference	CLEO: Science and Innovations, CLEO_SI 2020
Country/Territory	United States
City	Washington
Period	20/5/10 → 20/5/15

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10.1364/CLEO_SI.2020.STh3H.2

Cite this

@inproceedings{951a8668e8694bbeac3a64de91ea8bf3,

title = "Laser microfabrication of metal surfaces by tightly focused higher-order vector beams",

abstract = "We present an experimental study on laser microfabrication of metal surfaces by using femtosecond, higher-order vector beams. The contribution of the longitudinal electric field in laser ablation depends on target material.",

author = "Masaki Sato and Yuichi Kozawa and Shunichi Sato",

note = "Funding Information: We thank Citizen Watch Co., LTD for the provision of the liquid crystal device. Publisher Copyright: {\textcopyright} OSA 2020 {\textcopyright} 2020 The Author(s); CLEO: Science and Innovations, CLEO_SI 2020 ; Conference date: 10-05-2020 Through 15-05-2020",

year = "2020",

doi = "10.1364/CLEO_SI.2020.STh3H.2",

language = "English",

isbn = "9781943580767",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "CLEO",

}

Sato, M, Kozawa, Y & Sato, S 2020, Laser microfabrication of metal surfaces by tightly focused higher-order vector beams. in CLEO: Science and Innovations, CLEO_SI 2020., STh3H.2, Optics InfoBase Conference Papers, vol. Part F183-CLEO-SI 2020, Optica Publishing Group (formerly OSA), CLEO: Science and Innovations, CLEO_SI 2020, Washington, United States, 20/5/10. https://doi.org/10.1364/CLEO_SI.2020.STh3H.2

Laser microfabrication of metal surfaces by tightly focused higher-order vector beams. / Sato, Masaki; Kozawa, Yuichi ; Sato, Shunichi.
CLEO: Science and Innovations, CLEO_SI 2020. Optica Publishing Group (formerly OSA), 2020. STh3H.2 (Optics InfoBase Conference Papers; Vol. Part F183-CLEO-SI 2020).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Laser microfabrication of metal surfaces by tightly focused higher-order vector beams

AU - Sato, Masaki

AU - Kozawa, Yuichi

AU - Sato, Shunichi

PY - 2020

Y1 - 2020

N2 - We present an experimental study on laser microfabrication of metal surfaces by using femtosecond, higher-order vector beams. The contribution of the longitudinal electric field in laser ablation depends on target material.

AB - We present an experimental study on laser microfabrication of metal surfaces by using femtosecond, higher-order vector beams. The contribution of the longitudinal electric field in laser ablation depends on target material.

UR - http://www.scopus.com/inward/record.url?scp=85095448350&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85095448350&partnerID=8YFLogxK

U2 - 10.1364/CLEO_SI.2020.STh3H.2

DO - 10.1364/CLEO_SI.2020.STh3H.2

M3 - Conference contribution

AN - SCOPUS:85095448350

SN - 9781943580767

T3 - Optics InfoBase Conference Papers

BT - CLEO

PB - Optica Publishing Group (formerly OSA)

T2 - CLEO: Science and Innovations, CLEO_SI 2020

Y2 - 10 May 2020 through 15 May 2020

ER -

Laser microfabrication of metal surfaces by tightly focused higher-order vector beams

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