Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture

N. Wang; S. Yoshida; M. Kumano; Y. Kawai; S. Tanaka; M. Esashi

doi:10.1109/MEMSYS.2013.6474211

Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture

N. Wang, S. Yoshida, M. Kumano, Y. Kawai, S. Tanaka, M. Esashi

ENG - Robotics

Tohoku University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

This paper reports on the fabrication and characterization of a novel laterally-driven piezoelectric bimorph MEMS actuator with high aspect-ratio (AR) lead-zirconate-titanate (PZT) structure. In the fabrication process, the PZT structures (AR=8) was successfully fabricated by filling deep Si trenches with nanocomposite sol-gel PZT. A lateral displacement of 10 μm was obtained from a 500-μm-long actuator by bimorph actuation at driving voltages of +25 V/-5 V, while no vertical cross-motion as well as no initial vertical bending was observed. Compared with conventional capacitive comb-drive actuators, this actuator occupies a much smaller area to generate identical force or displacement. This actuator has the potential to become a new actuation technology in MEMS.

Original language	English
Title of host publication	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages	197-200
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474211
Publication status	Published - 2013
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China Duration: 2013 Jan 20 → 2013 Jan 24

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/Territory	Taiwan, Province of China
City	Taipei
Period	13/1/20 → 13/1/24

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10.1109/MEMSYS.2013.6474211

Cite this

Wang, N., Yoshida, S., Kumano, M., Kawai, Y., Tanaka, S., & Esashi, M. (2013). Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 197-200). Article 6474211 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474211

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title = "Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture",

abstract = "This paper reports on the fabrication and characterization of a novel laterally-driven piezoelectric bimorph MEMS actuator with high aspect-ratio (AR) lead-zirconate-titanate (PZT) structure. In the fabrication process, the PZT structures (AR=8) was successfully fabricated by filling deep Si trenches with nanocomposite sol-gel PZT. A lateral displacement of 10 μm was obtained from a 500-μm-long actuator by bimorph actuation at driving voltages of +25 V/-5 V, while no vertical cross-motion as well as no initial vertical bending was observed. Compared with conventional capacitive comb-drive actuators, this actuator occupies a much smaller area to generate identical force or displacement. This actuator has the potential to become a new actuation technology in MEMS.",

author = "N. Wang and S. Yoshida and M. Kumano and Y. Kawai and S. Tanaka and M. Esashi",

year = "2013",

doi = "10.1109/MEMSYS.2013.6474211",

language = "English",

isbn = "9781467356558",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "197--200",

booktitle = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013",

note = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",

}

Wang, N, Yoshida, S, Kumano, M, Kawai, Y, Tanaka, S & Esashi, M 2013, Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474211, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 197-200, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, Province of China, 13/1/20. https://doi.org/10.1109/MEMSYS.2013.6474211

Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture. / Wang, N.; Yoshida, S.; Kumano, M. et al.
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 197-200 6474211 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

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AU - Wang, N.

AU - Yoshida, S.

AU - Kumano, M.

AU - Kawai, Y.

AU - Tanaka, S.

AU - Esashi, M.

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N2 - This paper reports on the fabrication and characterization of a novel laterally-driven piezoelectric bimorph MEMS actuator with high aspect-ratio (AR) lead-zirconate-titanate (PZT) structure. In the fabrication process, the PZT structures (AR=8) was successfully fabricated by filling deep Si trenches with nanocomposite sol-gel PZT. A lateral displacement of 10 μm was obtained from a 500-μm-long actuator by bimorph actuation at driving voltages of +25 V/-5 V, while no vertical cross-motion as well as no initial vertical bending was observed. Compared with conventional capacitive comb-drive actuators, this actuator occupies a much smaller area to generate identical force or displacement. This actuator has the potential to become a new actuation technology in MEMS.

AB - This paper reports on the fabrication and characterization of a novel laterally-driven piezoelectric bimorph MEMS actuator with high aspect-ratio (AR) lead-zirconate-titanate (PZT) structure. In the fabrication process, the PZT structures (AR=8) was successfully fabricated by filling deep Si trenches with nanocomposite sol-gel PZT. A lateral displacement of 10 μm was obtained from a 500-μm-long actuator by bimorph actuation at driving voltages of +25 V/-5 V, while no vertical cross-motion as well as no initial vertical bending was observed. Compared with conventional capacitive comb-drive actuators, this actuator occupies a much smaller area to generate identical force or displacement. This actuator has the potential to become a new actuation technology in MEMS.

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Wang N, Yoshida S, Kumano M, Kawai Y, Tanaka S, Esashi M. Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 197-200. 6474211. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2013.6474211

Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture

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