Layer-by-layer growth of high-optical-quality ZnO film on atomically smooth and lattice relaxed ZnO buffer layer

A. Tsukazaki; A. Ohtomo; S. Yoshida; M. Kawasaki; C. H. Chia; T. Makino; Y. Segawa; T. Koida; S. F. Chichibu; H. Koinuma

doi:10.1063/1.1615834

Layer-by-layer growth of high-optical-quality ZnO film on atomically smooth and lattice relaxed ZnO buffer layer

A. Tsukazaki, A. Ohtomo, S. Yoshida, M. Kawasaki, C. H. Chia, T. Makino, Y. Segawa, T. Koida, S. F. Chichibu, H. Koinuma

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67 Citations (Scopus)

Abstract

The layer-by-layer growth of high-optical-quality ZnO thin films on atomically smooth and lattice relaxed ZnO buffer layer was discussed. The intensity oscillation of reflection high-energy electron diffraction persisted for more than a 100-nm film deposition under optimized conditions on buffer layer. It was found that the thin films showed free exciton emissions in a 5 K photoluminescence.

Original language	English
Pages (from-to)	2784-2786
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	14
DOIs	https://doi.org/10.1063/1.1615834
Publication status	Published - 2003 Oct 6

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abstract = "The layer-by-layer growth of high-optical-quality ZnO thin films on atomically smooth and lattice relaxed ZnO buffer layer was discussed. The intensity oscillation of reflection high-energy electron diffraction persisted for more than a 100-nm film deposition under optimized conditions on buffer layer. It was found that the thin films showed free exciton emissions in a 5 K photoluminescence.",

author = "A. Tsukazaki and A. Ohtomo and S. Yoshida and M. Kawasaki and Chia, {C. H.} and T. Makino and Y. Segawa and T. Koida and Chichibu, {S. F.} and H. Koinuma",

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AU - Tsukazaki, A.

AU - Ohtomo, A.

AU - Yoshida, S.

AU - Kawasaki, M.

AU - Chia, C. H.

AU - Makino, T.

AU - Segawa, Y.

AU - Koida, T.

AU - Chichibu, S. F.

AU - Koinuma, H.

PY - 2003/10/6

Y1 - 2003/10/6

N2 - The layer-by-layer growth of high-optical-quality ZnO thin films on atomically smooth and lattice relaxed ZnO buffer layer was discussed. The intensity oscillation of reflection high-energy electron diffraction persisted for more than a 100-nm film deposition under optimized conditions on buffer layer. It was found that the thin films showed free exciton emissions in a 5 K photoluminescence.

AB - The layer-by-layer growth of high-optical-quality ZnO thin films on atomically smooth and lattice relaxed ZnO buffer layer was discussed. The intensity oscillation of reflection high-energy electron diffraction persisted for more than a 100-nm film deposition under optimized conditions on buffer layer. It was found that the thin films showed free exciton emissions in a 5 K photoluminescence.

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JF - Applied Physics Letters

IS - 14

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Layer-by-layer growth of high-optical-quality ZnO film on atomically smooth and lattice relaxed ZnO buffer layer

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