Layer stacked Co/Pt films with high perpendicular anisotropy sputter deposited at room temperature

The deposition of a Co/Pt layer-stacked film that has a high perpendicular anisotropy and saturation magnetization was investigated using co-sputtering of Co and Pt at room temperature. A film with a high perpendicular anisotropy of 1 × 10⁷ erg/cm³ and a saturation magnetization of 600 emu/cm³ was obtained when 0.62 nm of Co and 0.45 nm of Pt layers were stacked at a high Ar deposition pressure of 4.8 Pa. Although the cause of the high anisotropy is not clear, the high perpendicular anisotropy and saturation magnetization that were obtained fulfill the magnetic property requirement of bit-patterned media for high-density recording.