TY - JOUR
T1 - Local deep level transient spectroscopy using super-higher-order scanning nonlinear dielectric microscopy
AU - Chinone, N.
AU - Kosugi, R.
AU - Tanaka, Y.
AU - Harada, S.
AU - Okumura, H.
AU - Cho, Y.
N1 - Funding Information:
This work is partially supported by SIP (No. P14029 ) from NEDO , Grand-in-Aid for Scientific Research S (No. 23226008 ) and A ( 16H02330 ) from Japan Society for the promotion of Science (JSPS) and Research Fellowship for Young Scientist (No. 268084 ) from JSPS .
Publisher Copyright:
© 2016 Elsevier Ltd
PY - 2016/9/1
Y1 - 2016/9/1
N2 - A new technique for local deep level transient spectroscopy imaging using super-higher-order scanning nonlinear dielectric microscopy is proposed. Using this technique, SiO2/SiC structure samples with different post oxidation annealing conditions were measured. We observed that the local DLTS signal decreases with post oxidation annealing (POA), which agrees with the well-known phenomena that POA reduces trap density. Furthermore, obtained local DLTS images had dark and bright areas, which is considered to show the trap distribution at/near SiO2/SiC interface.
AB - A new technique for local deep level transient spectroscopy imaging using super-higher-order scanning nonlinear dielectric microscopy is proposed. Using this technique, SiO2/SiC structure samples with different post oxidation annealing conditions were measured. We observed that the local DLTS signal decreases with post oxidation annealing (POA), which agrees with the well-known phenomena that POA reduces trap density. Furthermore, obtained local DLTS images had dark and bright areas, which is considered to show the trap distribution at/near SiO2/SiC interface.
KW - Local deep level transient spectroscopy
KW - Super-higher-order scanning nonlinear dielectric microscopy
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U2 - 10.1016/j.microrel.2016.07.088
DO - 10.1016/j.microrel.2016.07.088
M3 - Article
AN - SCOPUS:84991698839
SN - 0026-2714
VL - 64
SP - 566
EP - 569
JO - Microelectronics Reliability
JF - Microelectronics Reliability
ER -