Local lattice parameter determination of strained areas of semiconductors using CBED

Takayuki Akaogi, Kenji Tsuda, Masami Terauchi, Michiyoshi Tanaka

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	310-311
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	10
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/S1431927604883727
Publication status	Published - 2004

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author = "Takayuki Akaogi and Kenji Tsuda and Masami Terauchi and Michiyoshi Tanaka",

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AU - Tsuda, Kenji

AU - Terauchi, Masami

AU - Tanaka, Michiyoshi

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JO - Microscopy and Microanalysis

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