Abstract
This paper reports the theoretical and experimental investigations of the strain-induced resonant wavelength shift effect of a 2-D photonic crystal (PhC) cavity for strain sensing applications. Strain sensitivity of a high quality factor PhC cavity is studied based on finite element method (FEM) and finite difference time domain (FDTD) simulations. The results show that the resonant wavelength of cavity is proportional to the application of strain. Linear relationships between strain applied and shift of resonant wavelength were obtained. Accordingly, it is possible to detect the strain by determining resonant wavelength shift. The test device was realized on silicon-on-insulator for experimental investigation. The sensitivity to longitudinal strains was determined to be 0.95 pm/μ-strain.
Original language | English |
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Pages (from-to) | 1357-1360 |
Number of pages | 4 |
Journal | Procedia Engineering |
Volume | 25 |
DOIs | |
Publication status | Published - 2011 |
Event | 25th Eurosensors Conference - Athens, Greece Duration: 2011 Sept 4 → 2011 Sept 7 |
Keywords
- Cavity
- FDTD
- Photonic crystal
- Strain sensing
ASJC Scopus subject areas
- Engineering(all)