Low frictional coating by cosputtering in combination with excimer laser irradiation for aerospace applications

Masahiro Goto; Akira Kasahara; Masahiro Tosa; Jonathan Hobley; Maki Kishimoto; Kazuhiro Yoshihara; Hiroshi Fukumura

doi:10.1116/1.1487873

Low frictional coating by cosputtering in combination with excimer laser irradiation for aerospace applications

Masahiro Goto, Akira Kasahara, Masahiro Tosa, Jonathan Hobley, Maki Kishimoto, Kazuhiro Yoshihara, Hiroshi Fukumura

Research output: Contribution to journal › Article › peer-review

12 Citations (Scopus)

Abstract

Surface oxidized BN/Cu coating films on stainless steel substrates were synthesized by magnetron cosputtering combined with KrF excimer laser irradiation. The irradiated films had very low frictional coefficients in UHV conditions. The low frictional property was maintained even after oxidation and prolonged UV irradiation. Thus, it was confirmed that the coating is suitable for several aerospace applications.

Original language	English
Pages (from-to)	1458-1461
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	20
Issue number	4
DOIs	https://doi.org/10.1116/1.1487873
Publication status	Published - 2002 Jul
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "Surface oxidized BN/Cu coating films on stainless steel substrates were synthesized by magnetron cosputtering combined with KrF excimer laser irradiation. The irradiated films had very low frictional coefficients in UHV conditions. The low frictional property was maintained even after oxidation and prolonged UV irradiation. Thus, it was confirmed that the coating is suitable for several aerospace applications.",

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T1 - Low frictional coating by cosputtering in combination with excimer laser irradiation for aerospace applications

AU - Goto, Masahiro

AU - Kasahara, Akira

AU - Tosa, Masahiro

AU - Hobley, Jonathan

AU - Kishimoto, Maki

AU - Yoshihara, Kazuhiro

AU - Fukumura, Hiroshi

PY - 2002/7

Y1 - 2002/7

N2 - Surface oxidized BN/Cu coating films on stainless steel substrates were synthesized by magnetron cosputtering combined with KrF excimer laser irradiation. The irradiated films had very low frictional coefficients in UHV conditions. The low frictional property was maintained even after oxidation and prolonged UV irradiation. Thus, it was confirmed that the coating is suitable for several aerospace applications.

AB - Surface oxidized BN/Cu coating films on stainless steel substrates were synthesized by magnetron cosputtering combined with KrF excimer laser irradiation. The irradiated films had very low frictional coefficients in UHV conditions. The low frictional property was maintained even after oxidation and prolonged UV irradiation. Thus, it was confirmed that the coating is suitable for several aerospace applications.

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Low frictional coating by cosputtering in combination with excimer laser irradiation for aerospace applications

Abstract

ASJC Scopus subject areas

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