Surface oxidized BN/Cu coating films on stainless steel substrates were synthesized by magnetron cosputtering combined with KrF excimer laser irradiation. The irradiated films had very low frictional coefficients in UHV conditions. The low frictional property was maintained even after oxidation and prolonged UV irradiation. Thus, it was confirmed that the coating is suitable for several aerospace applications.
|Number of pages||4|
|Journal||Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films|
|Publication status||Published - 2002 Jul|
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films