Low-gas-pressure sputtering of CoPtCr-SiO2 granular films made by a sintered target without SiO2 powder

Shingo Sasaki; Shin Saito; Migaku Takahashi

doi:10.1109/LMAG.2010.2054830

Low-gas-pressure sputtering of CoPtCr-SiO₂ granular films made by a sintered target without SiO₂ powder

Shingo Sasaki, Shin Saito, Migaku Takahashi

ENG - Electronic Engineering

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

A new low-Ar-gas-pressure (PAr) sputtering process is proposed for the preparation of granular metal-oxide films for use as perpendicular magnetic recording media. CoO and CoSi powders were used as the raw materials of the sintered target rather than SiO2 powder to obtain the O/Si ratio to 2 in a granular film under low PAr process. Strongly exchange-coupled media were obtained at PAr = 0.6 Pa using a conventional (Co)-(Pt)-(Cr)-(SiO2) target, while use of the proposed (Co)-(Pt)-(Cr)-(CoSi)-enriched(CoO) target adjusted the oxygen composition in the granular film, which resulted in the successful fabrication of well magnetically decoupled media at PAr = 0.6 Pa.

Original language	English
Article number	5518470
Journal	IEEE Magnetics Letters
Volume	1
DOIs	https://doi.org/10.1109/LMAG.2010.2054830
Publication status	Published - 2010

Keywords

CoPtCr-SiO
Information storage
nanomagnetics
perpendicular magnetic recording
thin films

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10.1109/LMAG.2010.2054830

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title = "Low-gas-pressure sputtering of CoPtCr-SiO2 granular films made by a sintered target without SiO2 powder",

abstract = "A new low-Ar-gas-pressure (PAr) sputtering process is proposed for the preparation of granular metal-oxide films for use as perpendicular magnetic recording media. CoO and CoSi powders were used as the raw materials of the sintered target rather than SiO2 powder to obtain the O/Si ratio to 2 in a granular film under low PAr process. Strongly exchange-coupled media were obtained at PAr = 0.6 Pa using a conventional (Co)-(Pt)-(Cr)-(SiO2) target, while use of the proposed (Co)-(Pt)-(Cr)-(CoSi)-enriched(CoO) target adjusted the oxygen composition in the granular film, which resulted in the successful fabrication of well magnetically decoupled media at PAr = 0.6 Pa.",

keywords = "CoPtCr-SiO, Information storage, nanomagnetics, perpendicular magnetic recording, thin films",

author = "Shingo Sasaki and Shin Saito and Migaku Takahashi",

note = "Funding Information: The authors would like to thank Y. Nakamura, Y. Ikeda, and A. Satoh from Nippon Mining and Metals Co., Ltd. for their cooperation with the fabrication of targets used in these experiments. This work was supported in part by the Industrial Technology Research Grant Program in 2006 from the New Energy and Industrial Technology Development Organization (NEDO) of Japan and the Storage Research Consortium (SRC) of Japan.",

year = "2010",

doi = "10.1109/LMAG.2010.2054830",

language = "English",

volume = "1",

journal = "IEEE Magnetics Letters",

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AU - Sasaki, Shingo

AU - Saito, Shin

AU - Takahashi, Migaku

N1 - Funding Information: The authors would like to thank Y. Nakamura, Y. Ikeda, and A. Satoh from Nippon Mining and Metals Co., Ltd. for their cooperation with the fabrication of targets used in these experiments. This work was supported in part by the Industrial Technology Research Grant Program in 2006 from the New Energy and Industrial Technology Development Organization (NEDO) of Japan and the Storage Research Consortium (SRC) of Japan.

PY - 2010

Y1 - 2010

N2 - A new low-Ar-gas-pressure (PAr) sputtering process is proposed for the preparation of granular metal-oxide films for use as perpendicular magnetic recording media. CoO and CoSi powders were used as the raw materials of the sintered target rather than SiO2 powder to obtain the O/Si ratio to 2 in a granular film under low PAr process. Strongly exchange-coupled media were obtained at PAr = 0.6 Pa using a conventional (Co)-(Pt)-(Cr)-(SiO2) target, while use of the proposed (Co)-(Pt)-(Cr)-(CoSi)-enriched(CoO) target adjusted the oxygen composition in the granular film, which resulted in the successful fabrication of well magnetically decoupled media at PAr = 0.6 Pa.

AB - A new low-Ar-gas-pressure (PAr) sputtering process is proposed for the preparation of granular metal-oxide films for use as perpendicular magnetic recording media. CoO and CoSi powders were used as the raw materials of the sintered target rather than SiO2 powder to obtain the O/Si ratio to 2 in a granular film under low PAr process. Strongly exchange-coupled media were obtained at PAr = 0.6 Pa using a conventional (Co)-(Pt)-(Cr)-(SiO2) target, while use of the proposed (Co)-(Pt)-(Cr)-(CoSi)-enriched(CoO) target adjusted the oxygen composition in the granular film, which resulted in the successful fabrication of well magnetically decoupled media at PAr = 0.6 Pa.

KW - CoPtCr-SiO

KW - Information storage

KW - nanomagnetics

KW - perpendicular magnetic recording

KW - thin films

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DO - 10.1109/LMAG.2010.2054830

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JO - IEEE Magnetics Letters

JF - IEEE Magnetics Letters

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ER -

Low-gas-pressure sputtering of CoPtCr-SiO₂ granular films made by a sintered target without SiO₂ powder

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Keywords

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