@inproceedings{fb66ade590c04741abfedbbad8d84b18,
title = "Low-k PZT film for commercial use",
abstract = "Monocrystalline-like epitaxial PZT films for commercial use are described for piezoelectric MEMS applications. Films at the morphotropic phase boundary (MPB) with a thickness of 1 µm to 2 µm exhibit a typical transverse piezoelectric d31 coefficient of -185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. The figure-of-merit for MEMS device is more than 50 GPa. These films are commercially available for piezoelectric MEMS device development and production.",
keywords = "Epitaxial, Piezoelectric, PZT, Sputtering, Thin film",
author = "Mario Kiuchi and Ryoma Miyake and Shinya Yoshida and Shuji Tanaka and Tsuyoshi Takemoto and Yukitaka Yamaguchi and Kenji Komaki",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 IEEE International Ultrasonics Symposium, IUS 2020 ; Conference date: 07-09-2020 Through 11-09-2020",
year = "2020",
month = sep,
day = "7",
doi = "10.1109/IUS46767.2020.9251537",
language = "English",
series = "IEEE International Ultrasonics Symposium, IUS",
publisher = "IEEE Computer Society",
booktitle = "IUS 2020 - International Ultrasonics Symposium, Proceedings",
address = "United States",
}