Low-k PZT film for commercial use

Mario Kiuchi, Ryoma Miyake, Shinya Yoshida, Shuji Tanaka, Tsuyoshi Takemoto, Yukitaka Yamaguchi, Kenji Komaki

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Monocrystalline-like epitaxial PZT films for commercial use are described for piezoelectric MEMS applications. Films at the morphotropic phase boundary (MPB) with a thickness of 1 µm to 2 µm exhibit a typical transverse piezoelectric d31 coefficient of -185 pm/V, relative dielectric permittivity of 430 and dielectric loss of 0.015. The figure-of-merit for MEMS device is more than 50 GPa. These films are commercially available for piezoelectric MEMS device development and production.

Original languageEnglish
Title of host publicationIUS 2020 - International Ultrasonics Symposium, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781728154480
Publication statusPublished - 2020 Sept 7
Event2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States
Duration: 2020 Sept 72020 Sept 11

Publication series

NameIEEE International Ultrasonics Symposium, IUS
ISSN (Print)1948-5719
ISSN (Electronic)1948-5727


Conference2020 IEEE International Ultrasonics Symposium, IUS 2020
Country/TerritoryUnited States
CityLas Vegas


  • Epitaxial
  • Piezoelectric
  • PZT
  • Sputtering
  • Thin film


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