Abstract
We present the basic low-temperature characteristics of SiO 2/Si/SiO2 Hall-bar devices, where each Hall-bar arm is split into p- and n-type Ohmic contacts made by selective area ion-implantation doping of boron and phosphorus, respectively. Magnetotransport measurements of a 22-nm-thick Si(001) quantum well show Shubnikov-de Haas oscillations of two-dimensional holes in addition to the electrons generated at both sides of the quantum well. We discuss applications for extracting the physical characteristics of this technologically vital material system.
Original language | English |
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Pages (from-to) | 2596-2598 |
Number of pages | 3 |
Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
Volume | 46 |
Issue number | 4 B |
DOIs | |
Publication status | Published - 2007 Apr 24 |
Keywords
- Ambipolar
- Hall-bar
- Magnetotransport
- Mobility
- Quantum Hall effect
- Silicon
- Silicon-on-insulator (SOI) electrons and holes
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)