Y-Ba-Cu-O superconducting films having a zero-resistance temperature of 84-85 K were prepared at 650°C on SrTiO3(100) single-crystal substrates without postannealing by thermal chemical vapor deposition using β-diketone metal chelates as sources and O2 with low partial pressure as a reactant gas. The films mainly consisted of YBa2Cu3Ox with a-axis and c-axis orientations normal to the film planes.
|Number of pages
|Japanese Journal of Applied Physics
|Published - 1991 Jun 1