Low temperature fabrication of barium titanate hybrid films and their dielectric properties

Yoshio Kobayashi, Hirobumi Saito, Takafumi Kinoshita, Daisuke Nagao, Mikio Konno

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8 Citations (Scopus)


A method for incorporating BT nano-crystalline into barium titanate (BT) films is proposed for a low temperature fabrication of high dielectric constant films. BT nanoparticles were synthesized by hydrolysis of a BT complex alkoxide in 2-methoxyethanol (ME)/ethanol cosolvent. As the ME volume fraction in the cosolvent (ME fraction) increased from 0 to 100%, the particle and crystal sizes tended to increase from 13.4 to 30.2 nm and from 15.8 to 31.4 nm, respectively, and the particle dispersion in the solution became more improved. The BT particles were mixed with BT complex alkoxide dissolved in an ME/ethanol cosolvent for preparing a precursor solution that was then spin-coated on a Pt substrate and dried at 150 °C. The dielectric constant of the spin-coated BT hybrid film increased with an increase in the volume fraction of the BT particles in the film. The dissipation factor of the hybrid film tended to decrease with an increase in the ME fraction in the precursor solution. The hybrid film fabricated at a BT fraction of 30% and an ME fraction of 25% attained a dielectric constant as high as 94.5 with a surface roughness of 14.0 nm and a dissipation factor of 0.11.

Original languageEnglish
Pages (from-to)1971-1975
Number of pages5
JournalThin Solid Films
Issue number6
Publication statusPublished - 2011 Jan 3


  • Barium titanate
  • Dielectric property
  • Hybrid
  • Nanoparticles
  • Thin films


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