TY - JOUR
T1 - Low-temperature formation of Y‒Ba‒Cu‒O superconducting films by thermal CVD and their J c in high magnetic fields
AU - Yamane, Hisanori
AU - Hasei, Masaharu
AU - Kurosawa, Hideyuki
AU - Watanabe, Kazuo
AU - Awaji, Satoshi
AU - Kobayashi, Norio
AU - Hirai, Toshio
AU - Muto, Yoshio
N1 - Funding Information:
This work was supported, in part, by a Grant-in-Aid for Developmental Scientific Research under Contract no. 0255146 and a Grant-in-Aid for Scientific Research on Priority Area under Contract no. 02227201 from the Ministry of Education, Science and Culture, Japan.
PY - 1991/12/2
Y1 - 1991/12/2
N2 - Y-Ba-Cu-O superconducting films were prepared at 700 and 720°C on SrTiO3(1 0 0) single crystal substrates by thermal chemical vapor deposition (CVD) using β-diketone metal chelates as sources. Total gas pressure in a hot-wall type CVD reactor used was 10 Torr. Oxygen partial pressure (P(O2)) was 0.036 Torr. The films mostly consisted of YBa2Cu3Ox with c-axis orientation perpendicular to the substrate plane and included small amounts of grains with a-axis orientation. These films showed zero resistivity at 90 K. The critical current densities (Jc, criterion: 2 μV/cm) of the films obtained at 700 and 720°C were 2.2×106 and 2.9×106 A/cm2 at 77.3 K and 0 T, respectively. A Jc of 2.1 × 104 A/cm2 was measured at 77.3 K in a magnetic field of 23 T for the film prepared at 720°C.
AB - Y-Ba-Cu-O superconducting films were prepared at 700 and 720°C on SrTiO3(1 0 0) single crystal substrates by thermal chemical vapor deposition (CVD) using β-diketone metal chelates as sources. Total gas pressure in a hot-wall type CVD reactor used was 10 Torr. Oxygen partial pressure (P(O2)) was 0.036 Torr. The films mostly consisted of YBa2Cu3Ox with c-axis orientation perpendicular to the substrate plane and included small amounts of grains with a-axis orientation. These films showed zero resistivity at 90 K. The critical current densities (Jc, criterion: 2 μV/cm) of the films obtained at 700 and 720°C were 2.2×106 and 2.9×106 A/cm2 at 77.3 K and 0 T, respectively. A Jc of 2.1 × 104 A/cm2 was measured at 77.3 K in a magnetic field of 23 T for the film prepared at 720°C.
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U2 - 10.1016/S0921-4534(05)80204-7
DO - 10.1016/S0921-4534(05)80204-7
M3 - Article
AN - SCOPUS:0026414725
SN - 0921-4534
VL - 190
SP - 79
EP - 80
JO - Physica C: Superconductivity and its Applications
JF - Physica C: Superconductivity and its Applications
IS - 1-2
ER -