TY - JOUR
T1 - Low temperature processing of crystalline lead zirconate titanate (PZT) film and the direct micropatterning by laser-induced pyrolysis of a sol-gel-derived film
AU - Watanabe, Akira
AU - Tanase, Tomokazu
AU - Kobayashi, Yoshio
AU - Konno, Mikio
AU - Yamada, Shinji
AU - Miwa, Takao
PY - 2003/7/15
Y1 - 2003/7/15
N2 - A novel low-temperature processing of crystalline lead zirconate titanate (PZT) film was developed. The beam from an Ar ion laser was focused and scanned on the sol-gel derived film, and it induced pyrolysis of the precursor film with spatially selectivity. Development of the film using an acidic solution gave the PZT micropattern. The Raman spectrum of the micropattern exhibited the characteristics of crystalline PZT.
AB - A novel low-temperature processing of crystalline lead zirconate titanate (PZT) film was developed. The beam from an Ar ion laser was focused and scanned on the sol-gel derived film, and it induced pyrolysis of the precursor film with spatially selectivity. Development of the film using an acidic solution gave the PZT micropattern. The Raman spectrum of the micropattern exhibited the characteristics of crystalline PZT.
KW - Laser-induced pyrolysis
KW - Lead zirconate titanate
KW - Low-temperature processing
KW - Micro-Raman spectroscopy
KW - Micropattering
KW - Sol-gel
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U2 - 10.1143/jjap.42.l843
DO - 10.1143/jjap.42.l843
M3 - Letter
AN - SCOPUS:0141831094
SN - 0021-4922
VL - 42
SP - L843-L845
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
IS - 7 B
ER -