Lower-Temperature processing of potassium niobate films by microwave-Assisted hydrothermal deposition technique

Masaki Okura, Yoshiharu Ito, Takahisa Shiraishi, Takanori Kiguchi, Toyohiko J. Konno, Hiroshi Funakubo, Hiroshi Uchida

Research output: Contribution to journalArticlepeer-review

Abstract

Low-Temperature processing based on microwave-Assisted hydrothermal synthesis was proposed for deposition of piezoelectric oxoate KNbO3 films. The films were deposited on various substrates at reaction temperature below 200 °C using Nb2O5 powder and KOH solution. Epitaxial (100)c KNbO3 film with 1.3 m-Thick was deposited at a reaction temperature of 150 °C on (100)cSrRuO3//(100)SrTiO3 using 12 moldm 3 KOH solution for 80 min, which is significantly faster than conventional hydrothermal process.

Original languageEnglish
Pages (from-to)123-130
Number of pages8
JournalJournal of the Ceramic Society of Japan
Volume130
Issue number1
DOIs
Publication statusPublished - 2022 Jan 1

Keywords

  • Crystal growth
  • Crystal orientation
  • Dielectrics
  • Epitaxial growth
  • Ferroelectrics
  • Hydrothermal synthesis
  • Potassium niobate
  • Thin film

ASJC Scopus subject areas

  • Ceramics and Composites
  • Chemistry(all)
  • Condensed Matter Physics
  • Materials Chemistry

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