The magnetic properties and the crystal structure of FeCu and FeAg thin films prepared by an rf sputtering technique are examined. Solid solutions of FeCu and FeAg systems can be obtained by the sputtering method. The coercive force of the as‐deposited Fe‐18.1 wt% Cu film is as high as 2400 A/m. However it decreases to 400 A/m and the initial permeability increases up to 600 by annealing at 623 K. In this case the lattice constant becomes identical to bulk α‐iron, and internal stress is relaxed. The coercive force of the as‐deposited FeAg film has a low value of 184 A/m at the concentration of Fe 50 wt% Ag. It is thought that the decrease of the grain size causes the low coercive force for the film.