Magnetic rf integrated thin-film inductors

M. Yamaguchi, M. Baba, K. Suezawa, T. Moizumi, K. I. Arai, Y. Shimada, A. Haga, S. Tanabe, K. Ito

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)


The magnetic thin film inductor with 4-tun, 337×337μm2 size spiral coil showed inductance 21% larger than the air core's while its quality factor was lower than the air core's. Keeping the similar quality factor as the air core, the micro patterned magnetic film inductor showed 11% inductance enhancement. The proposed inductor can be made on the passivation of integrated semiconductor devices.

Original languageEnglish
Pages (from-to)205-208
Number of pages4
JournalIEEE MTT-S International Microwave Symposium Digest
Publication statusPublished - 2000


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