Magnetic rf integrated thin-film inductors

M. Yamaguchi; M. Baba; K. Suezawa; T. Moizumi; K. I. Arai; Y. Shimada; A. Haga; S. Tanabe; K. Ito

doi:10.1109/MWSYM.2000.860942

Magnetic rf integrated thin-film inductors

M. Yamaguchi, M. Baba, K. Suezawa, T. Moizumi, K. I. Arai, Y. Shimada, A. Haga, S. Tanabe, K. Ito

New Industry Creation Hatchery Center (NICHe)

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Abstract

The magnetic thin film inductor with 4-tun, 337×337μm² size spiral coil showed inductance 21% larger than the air core's while its quality factor was lower than the air core's. Keeping the similar quality factor as the air core, the micro patterned magnetic film inductor showed 11% inductance enhancement. The proposed inductor can be made on the passivation of integrated semiconductor devices.

Original language	English
Pages (from-to)	205-208
Number of pages	4
Journal	IEEE MTT-S International Microwave Symposium Digest
Volume	1
DOIs	https://doi.org/10.1109/MWSYM.2000.860942
Publication status	Published - 2000

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10.1109/MWSYM.2000.860942

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AU - Yamaguchi, M.

AU - Baba, M.

AU - Suezawa, K.

AU - Moizumi, T.

AU - Arai, K. I.

AU - Shimada, Y.

AU - Haga, A.

AU - Tanabe, S.

AU - Ito, K.

PY - 2000

Y1 - 2000

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AB - The magnetic thin film inductor with 4-tun, 337×337μm2 size spiral coil showed inductance 21% larger than the air core's while its quality factor was lower than the air core's. Keeping the similar quality factor as the air core, the micro patterned magnetic film inductor showed 11% inductance enhancement. The proposed inductor can be made on the passivation of integrated semiconductor devices.

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JO - IEEE MTT-S International Microwave Symposium Digest

JF - IEEE MTT-S International Microwave Symposium Digest

ER -

Magnetic rf integrated thin-film inductors

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