Magnetic thin-film inductors for RF-integrated circuits

M. Yamaguchi, K. Suezawa, Y. Takahashi, K. I. Arai, S. Kikuchi, Y. Shimada, S. Tanabe, K. Ito

Research output: Contribution to journalConference articlepeer-review

54 Citations (Scopus)


Thin-film spiral inductors with micropatterned Fe-Al-O and CoNbZr films for the impedance matching elements in 1 GHz-drive mobile communication handset application have been demonstrated. Narrow slit trains along the easy axis direction control the ferromagnetic resonance frequency through the change of shape anisotropy energy and magnetostatic energy. The inductance was advantageous over the air-core spiral while Q was almost the same.

Original languageEnglish
Pages (from-to)807-810
Number of pages4
JournalJournal of Magnetism and Magnetic Materials
Publication statusPublished - 2000 Jun 2
Event14th International Symposium on Soft Magnetic Materials (SMM14) - Balatonfured, Hung
Duration: 1999 Sept 81999 Sept 10


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