Magnetically actuated cantilever with small resonator for scanning probe microscopy

Dong Weon Lee, Takahito Ono, Masayoshi Esashi

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)


Magnetically actuated cantilever with a small resonator has been developed for application of scanning probe microscopy. The torsional resonator with a small mass is located at the end of the cantilever beam, and is driven near its resonance frequency by electromagnetic force. A force interaction between a tip and a sample cause the shift of the resonance frequency and it is detected by electromotive force generated through motion of resonator in a magnetic field. As a result, the resonator can be used as a force sensor. The same method is used for an actuation of the cantilever, which is adjusted for constant force during scanning operation. The smaller resonator has the higher resonance frequency, and is insensitive to thermo-mechanical noise. Keywords: SPM; AFM; Non-contact; Electromagnetic force; Actuator.

Original languageEnglish
Pages (from-to)113-118
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Issue number3
Publication statusPublished - 2001


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