Magnetocaloric cooling of a thermally-isolated microstructure

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A solid-state micro magnetic refrigerator (SSMMR) has some advantages to cool microdevices because of its high efficiency and simple structure. In this study, we demonstrated the actual cooling of a thermally-isolated microstructure, which is a main component of the SSMMR, by the magnetocaloric effect. The thermal isolation structure is composed of parylene high-aspect-ratio beams for both high thermal isolation and high stiffness. A magnetic field switch was designed and fabricated to control the magnetic flux density from 0 T to about 1 T. Under this magnetic flux density change, the maximum temperature change of 1.0°C was confirmed.

Original languageEnglish
Article number094008
JournalJournal of Micromechanics and Microengineering
Issue number9
Publication statusPublished - 2012 Sept


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