Magnetostrictive Performance of Electrodeposited TBXDY(1-X)FEY Thin Filmevaluated from Microactuator

Hang Shim; Kei Sakamoto; Naoki Inomata; Masaya Toda; Nguyen Van Toan; Yunheub Song; Takahito Ono

doi:10.1109/TRANSDUCERS.2019.8808489

Magnetostrictive Performance of Electrodeposited TB_XDY_(1-X)FE_Y Thin Filmevaluated from Microactuator

Hang Shim, Kei Sakamoto, Naoki Inomata, Masaya Toda, Nguyen Van Toan, Yunheub Song, Takahito Ono

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper presents the process technology of microstructures fabrication of a magnetostrictive thin film Tb_xDy_(1-x)Fe_y for magnetic actuation, and the magnetostrictive actuation performances are evaluated. The film is deposited by electrodeposition using a three-electrodes system. Bi-material cantilever structures are fabricated and the magnetic actuation performances are evaluated. The actuators show high magnetostriction coefficients of approximately 1200 ppm at magnetic field 9000 Oe.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1698-1700
Number of pages	3
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808489
Publication status	Published - 2019 Jun
Event	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany Duration: 2019 Jun 23 → 2019 Jun 27

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference	20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/Territory	Germany
City	Berlin
Period	19/6/23 → 19/6/27

Keywords

Electrodeposition
TbDyFe
Terfenol-D

ASJC Scopus subject areas

Process Chemistry and Technology
Spectroscopy
Electrical and Electronic Engineering
Mechanical Engineering
Electronic, Optical and Magnetic Materials
Control and Optimization
Instrumentation

Access to Document

10.1109/TRANSDUCERS.2019.8808489

Cite this

Shim, H., Sakamoto, K., Inomata, N., Toda, M., Toan, N. V., Song, Y., & Ono, T. (2019). Magnetostrictive Performance of Electrodeposited TB_XDY_(1-X)FE_Y Thin Filmevaluated from Microactuator. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1698-1700). [8808489] (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808489

Magnetostrictive Performance of Electrodeposited TB_XDY_(1-X)FE_Y Thin Filmevaluated from Microactuator. / Shim, Hang; Sakamoto, Kei; Inomata, Naoki et al.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 1698-1700 8808489 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Shim, H, Sakamoto, K, Inomata, N , Toda, M , Toan, NV, Song, Y & Ono, T 2019, Magnetostrictive Performance of Electrodeposited TB_XDY_(1-X)FE_Y Thin Filmevaluated from Microactuator. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808489, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 1698-1700, 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Berlin, Germany, 19/6/23. https://doi.org/10.1109/TRANSDUCERS.2019.8808489

Shim H, Sakamoto K, Inomata N , Toda M , Toan NV, Song Y et al. Magnetostrictive Performance of Electrodeposited TB_XDY_(1-X)FE_Y Thin Filmevaluated from Microactuator. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 1698-1700. 8808489. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808489

Shim, Hang ; Sakamoto, Kei ; Inomata, Naoki et al. / Magnetostrictive Performance of Electrodeposited TB_XDY_(1-X)FE_Y Thin Filmevaluated from Microactuator. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 1698-1700 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

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title = "Magnetostrictive Performance of Electrodeposited TBXDY(1-X)FEY Thin Filmevaluated from Microactuator",

abstract = "This paper presents the process technology of microstructures fabrication of a magnetostrictive thin film TbxDy(1-x)Fey for magnetic actuation, and the magnetostrictive actuation performances are evaluated. The film is deposited by electrodeposition using a three-electrodes system. Bi-material cantilever structures are fabricated and the magnetic actuation performances are evaluated. The actuators show high magnetostriction coefficients of approximately 1200 ppm at magnetic field 9000 Oe.",

keywords = "Electrodeposition, TbDyFe, Terfenol-D",

author = "Hang Shim and Kei Sakamoto and Naoki Inomata and Masaya Toda and Toan, {Nguyen Van} and Yunheub Song and Takahito Ono",

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