@article{39d2085b89044efaab35034443374a08,
title = "Magnetostrictive performance of electrodeposited TbxDy(1-x)Fey thin film with microcantilever structures",
abstract = "The microfabrication with a magnetostrictive TbxDy(1-x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1-x)Fey is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb0.36Dy0.64Fe1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.",
keywords = "Electrodeposition, Magnetostriction, TbDyFe, Terfenol-D, Thin film",
author = "Hang Shim and Kei Sakamoto and Naoki Inomata and Masaya Toda and {Van Toan}, Nguyen and Takahito Ono",
note = "Funding Information: Acknowledgments: This work is partly done at Micro/nanomachining education center, Tohoku University, and Micro System Integration Center (µSiC), Tohoku University. This work was partly supported by Cabinet Office, Government of Japan, Cross-ministerial Strategic Innovation Promotion Program (SIP). Funding Information: A part of this work was funded by The New Energy and Industrial Technology Development Organization, NEDO. This work is partly done at Micro/nanomachining education center, Tohoku University, and Micro System Integration Center (?SiC), Tohoku University. This work was partly supported by Cabinet Office, Government of Japan, Cross-ministerial Strategic Innovation Promotion Program (SIP). Funding Information: Funding: A part of this work was funded by The New Energy and Industrial Technology Development Organization, NEDO. Publisher Copyright: {\textcopyright} 2020 by the authors.",
year = "2020",
month = may,
day = "1",
doi = "10.3390/mi11050523",
language = "English",
volume = "11",
journal = "Micromachines",
issn = "2072-666X",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "5",
}