Magnetron-type radio-frequency plasma control yielding vertically well-aligned carbon nanotube growth

T. Hirata; N. Satake; G. H. Jeong; T. Kato; R. Hatakeyama; K. Motomiya; K. Tohji

doi:10.1063/1.1601303

Magnetron-type radio-frequency plasma control yielding vertically well-aligned carbon nanotube growth

T. Hirata, N. Satake, G. H. Jeong, T. Kato, R. Hatakeyama, K. Motomiya, K. Tohji

ENG - Electronic Engineering

Tohoku University

Research output: Contribution to journal › Article › peer-review

59 Citations (Scopus)

Abstract

The effects of ion flux and ion bombardment energy for the nanotube growth were demonstrated. The magnetic field in a magnetron discharge led to the plasma-density increment and the self-bias reduction, yielding the nanotube-growth enhancement. It was found that the ion flux and ion bombardment energy has to be optimized to grow uniform, well-aligned and density controlled nanotubes.

Original language	English
Pages (from-to)	1119-1121
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	6
DOIs	https://doi.org/10.1063/1.1601303
Publication status	Published - 2003 Aug 11

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abstract = "The effects of ion flux and ion bombardment energy for the nanotube growth were demonstrated. The magnetic field in a magnetron discharge led to the plasma-density increment and the self-bias reduction, yielding the nanotube-growth enhancement. It was found that the ion flux and ion bombardment energy has to be optimized to grow uniform, well-aligned and density controlled nanotubes.",

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AU - Satake, N.

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AU - Hatakeyama, R.

AU - Motomiya, K.

AU - Tohji, K.

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N2 - The effects of ion flux and ion bombardment energy for the nanotube growth were demonstrated. The magnetic field in a magnetron discharge led to the plasma-density increment and the self-bias reduction, yielding the nanotube-growth enhancement. It was found that the ion flux and ion bombardment energy has to be optimized to grow uniform, well-aligned and density controlled nanotubes.

AB - The effects of ion flux and ion bombardment energy for the nanotube growth were demonstrated. The magnetic field in a magnetron discharge led to the plasma-density increment and the self-bias reduction, yielding the nanotube-growth enhancement. It was found that the ion flux and ion bombardment energy has to be optimized to grow uniform, well-aligned and density controlled nanotubes.

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Magnetron-type radio-frequency plasma control yielding vertically well-aligned carbon nanotube growth

Abstract

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