TY - GEN
T1 - Mass detection using capacitive resonant silicon sensor
AU - Kim, Sang Jin
AU - Ono, Takahito
AU - Esashi, Masayoshi
PY - 2006
Y1 - 2006
N2 - Capacitive resonant mass sensing employing a single-crystalline silicon resonator with a thickness of 250 nm and electrical LC oscillator is presented, and the detectable minimum mass of 1×10-14 g is obtained in air. It was shown that capacitive detection is less affected to noise than optical detection from the experimental comparison. Using the theoretical model and experimental results, low frequency noise originated in gas adsorption-desorption on sensor surface is evaluated. Finally, mass/stress induced resonance frequency shift due to the adsorption of ethanol and moist vapor is successfully demonstrated.
AB - Capacitive resonant mass sensing employing a single-crystalline silicon resonator with a thickness of 250 nm and electrical LC oscillator is presented, and the detectable minimum mass of 1×10-14 g is obtained in air. It was shown that capacitive detection is less affected to noise than optical detection from the experimental comparison. Using the theoretical model and experimental results, low frequency noise originated in gas adsorption-desorption on sensor surface is evaluated. Finally, mass/stress induced resonance frequency shift due to the adsorption of ethanol and moist vapor is successfully demonstrated.
UR - http://www.scopus.com/inward/record.url?scp=50149112007&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50149112007&partnerID=8YFLogxK
U2 - 10.1109/ICSENS.2007.355864
DO - 10.1109/ICSENS.2007.355864
M3 - Conference contribution
AN - SCOPUS:50149112007
SN - 1424403766
SN - 9781424403769
T3 - Proceedings of IEEE Sensors
SP - 1285
EP - 1288
BT - 2006 5th IEEE Conference on Sensors
T2 - 2006 5th IEEE Conference on Sensors
Y2 - 22 October 2006 through 25 October 2006
ER -