Mass detection using capacitive resonant silicon sensor

Sang Jin Kim, Takahito Ono, Masayoshi Esashi

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)


Capacitive resonant mass sensing employing a single-crystalline silicon resonator with a thickness of 250 nm and electrical LC oscillator is presented, and the detectable minimum mass of 1×10-14 g is obtained in air. It was shown that capacitive detection is less affected to noise than optical detection from the experimental comparison. Using the theoretical model and experimental results, low frequency noise originated in gas adsorption-desorption on sensor surface is evaluated. Finally, mass/stress induced resonance frequency shift due to the adsorption of ethanol and moist vapor is successfully demonstrated.

Original languageEnglish
Title of host publication2006 5th IEEE Conference on Sensors
Number of pages4
Publication statusPublished - 2006
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 2006 Oct 222006 Oct 25

Publication series

NameProceedings of IEEE Sensors


Conference2006 5th IEEE Conference on Sensors
Country/TerritoryKorea, Republic of


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