TY - GEN
T1 - Mass production of narrow chirality distributed single-walled carbon nanotubes by pulse plasma CVD
AU - Xu, Bin
AU - Kato, Toshiaki
AU - Kaneko, Toshiro
N1 - Publisher Copyright:
© 2016 IEEE.
PY - 2016/11/21
Y1 - 2016/11/21
N2 - Time-controlled pulse plasma CVD has been developed aiming for the mass production of narrow chirality distributed single-walled carbon nanotubes (SWNTs). Through the comparison of continuous plasma CVD and pulse plasma CVD, it is found that the amount of SWNTs can be increased in keeping with the initial narrow chirality distribution by repeating pulse plasma CVD. The effects of pulse time parameter, plasma off time, on the chirality distribution of SWNTs have been also investigated. The chirality distribution becomes narrow with an increase in the plasma off time, then it becomes broad with off time increase. This indicates adjustment of plasma time parameters in pulse plasma CVD can improve the uniformity of chirality distribution, resulting in the mass production of very narrow chirality distributed SWNTs.
AB - Time-controlled pulse plasma CVD has been developed aiming for the mass production of narrow chirality distributed single-walled carbon nanotubes (SWNTs). Through the comparison of continuous plasma CVD and pulse plasma CVD, it is found that the amount of SWNTs can be increased in keeping with the initial narrow chirality distribution by repeating pulse plasma CVD. The effects of pulse time parameter, plasma off time, on the chirality distribution of SWNTs have been also investigated. The chirality distribution becomes narrow with an increase in the plasma off time, then it becomes broad with off time increase. This indicates adjustment of plasma time parameters in pulse plasma CVD can improve the uniformity of chirality distribution, resulting in the mass production of very narrow chirality distributed SWNTs.
UR - http://www.scopus.com/inward/record.url?scp=85006854990&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85006854990&partnerID=8YFLogxK
U2 - 10.1109/NANO.2016.7751458
DO - 10.1109/NANO.2016.7751458
M3 - Conference contribution
AN - SCOPUS:85006854990
T3 - 16th International Conference on Nanotechnology - IEEE NANO 2016
SP - 620
EP - 621
BT - 16th International Conference on Nanotechnology - IEEE NANO 2016
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
Y2 - 22 August 2016 through 25 August 2016
ER -