Meandering coplanar line type thin film magnetic field sensor with direct bias

Shin Yabukami; Heroaki Uetake; Kenta Moriya; Tsuyoshi Tominami; Hidehiko Onodera

doi:10.1541/ieejfms.137.460

Meandering coplanar line type thin film magnetic field sensor with direct bias

Shin Yabukami, Heroaki Uetake, Kenta Moriya, Tsuyoshi Tominami, Hidehiko Onodera

MEN - Biomedical Engineering

Tohoku Gakuin University

Research output: Contribution to journal › Article › peer-review

Abstract

We propose a new simple method to directly apply dc current to the CoNbZr/Cu film of a sensor. A very sensitive thin film sensor was developed using a meandering coplanar line with biasing conductors fabricated from SrTiO film (0.75 μm thick), amorphous Co₈₅Nb₁₂Zr₃ film (1.0 mm × 2.45 mm, 1 μm thick) and Cu/Cr film (2 μm/0.1 μm). We discuss direct bias to CoNbZr film and Cu film under a CoNbZr film and compare it with an application of bias magnetic field. Good sensitivity (phase change over 100 degrees/Oe) was obtained by the proposed method.

Original language	English
Pages (from-to)	460-465
Number of pages	6
Journal	IEEJ Transactions on Fundamentals and Materials
Volume	137
Issue number	8
DOIs	https://doi.org/10.1541/ieejfms.137.460
Publication status	Published - 2017

Keywords

Bias
Meandering coplanar line

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10.1541/ieejfms.137.460

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@article{29a6dea0b9de46c89637e2d8ea9f97ca,

title = "Meandering coplanar line type thin film magnetic field sensor with direct bias",

abstract = "We propose a new simple method to directly apply dc current to the CoNbZr/Cu film of a sensor. A very sensitive thin film sensor was developed using a meandering coplanar line with biasing conductors fabricated from SrTiO film (0.75 μm thick), amorphous Co85Nb12Zr3 film (1.0 mm × 2.45 mm, 1 μm thick) and Cu/Cr film (2 μm/0.1 μm). We discuss direct bias to CoNbZr film and Cu film under a CoNbZr film and compare it with an application of bias magnetic field. Good sensitivity (phase change over 100 degrees/Oe) was obtained by the proposed method.",

keywords = "Bias, Meandering coplanar line",

author = "Shin Yabukami and Heroaki Uetake and Kenta Moriya and Tsuyoshi Tominami and Hidehiko Onodera",

note = "Publisher Copyright: {\textcopyright} 2017 The Institute of Electrical Engineers of Japan.",

year = "2017",

doi = "10.1541/ieejfms.137.460",

language = "English",

volume = "137",

pages = "460--465",

journal = "IEEJ Transactions on Fundamentals and Materials",

issn = "0385-4205",

publisher = "The Institute of Electrical Engineers of Japan",

number = "8",

}

TY - JOUR

T1 - Meandering coplanar line type thin film magnetic field sensor with direct bias

AU - Yabukami, Shin

AU - Uetake, Heroaki

AU - Moriya, Kenta

AU - Tominami, Tsuyoshi

AU - Onodera, Hidehiko

PY - 2017

Y1 - 2017

N2 - We propose a new simple method to directly apply dc current to the CoNbZr/Cu film of a sensor. A very sensitive thin film sensor was developed using a meandering coplanar line with biasing conductors fabricated from SrTiO film (0.75 μm thick), amorphous Co85Nb12Zr3 film (1.0 mm × 2.45 mm, 1 μm thick) and Cu/Cr film (2 μm/0.1 μm). We discuss direct bias to CoNbZr film and Cu film under a CoNbZr film and compare it with an application of bias magnetic field. Good sensitivity (phase change over 100 degrees/Oe) was obtained by the proposed method.

AB - We propose a new simple method to directly apply dc current to the CoNbZr/Cu film of a sensor. A very sensitive thin film sensor was developed using a meandering coplanar line with biasing conductors fabricated from SrTiO film (0.75 μm thick), amorphous Co85Nb12Zr3 film (1.0 mm × 2.45 mm, 1 μm thick) and Cu/Cr film (2 μm/0.1 μm). We discuss direct bias to CoNbZr film and Cu film under a CoNbZr film and compare it with an application of bias magnetic field. Good sensitivity (phase change over 100 degrees/Oe) was obtained by the proposed method.

KW - Bias

KW - Meandering coplanar line

UR - http://www.scopus.com/inward/record.url?scp=85026520970&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85026520970&partnerID=8YFLogxK

U2 - 10.1541/ieejfms.137.460

DO - 10.1541/ieejfms.137.460

M3 - Article

AN - SCOPUS:85026520970

SN - 0385-4205

VL - 137

SP - 460

EP - 465

JO - IEEJ Transactions on Fundamentals and Materials

JF - IEEJ Transactions on Fundamentals and Materials

IS - 8

ER -

Meandering coplanar line type thin film magnetic field sensor with direct bias

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