TY - JOUR
T1 - Measurement and correlation of adsorption equilibria of propylene glycol monomethyl ether acetate on activated carbon in the presence of supercritical carbon dioxide
AU - Ushiki, Ikuo
AU - Tsuji, Hiromu
AU - Takishima, Shigeki
AU - Ito, Yasuyuki
AU - Sato, Yoshiyuki
AU - Inomata, Hiroshi
N1 - Funding Information:
This work was supported by a JSPS (Japan Society for the Promotion of Science) KAKENHI Grant-in-Aid for Scientific Research [grant number 18K14045 ].
Publisher Copyright:
© 2020 Elsevier B.V.
PY - 2020/6/1
Y1 - 2020/6/1
N2 - The adsorption equilibria of propylene glycol monomethyl ether acetate (PGMEA), a major volatile organic compound (VOC) used in the semiconductor industry, on activated carbon were measured in the presence of supercritical carbon dioxide (scCO2) at temperatures from 313 K to 353 K and pressures from 10.0 MPa to 20.0 MPa. The amount of adsorbed PGMEA considerably depended on the pressure and temperature conditions in scCO2, which could be explained by the effects of CO2 density and VOC fugacity. The Dubinin–Astakhov (DA) equation has two fitting parameters, interaction energy between adsorbate and adsorbent (EVOC) and saturated adsorption capacity of VOC on adsorbent (W0,VOC), and was used to correlate the measured adsorption equilibria. Correlation by the DA equation was useful for analyzing the adsorption equilibria of PGMEA on activated carbon in scCO2 by considering the affinity of the adsorbate for the adsorbent and competitive adsorption of CO2.
AB - The adsorption equilibria of propylene glycol monomethyl ether acetate (PGMEA), a major volatile organic compound (VOC) used in the semiconductor industry, on activated carbon were measured in the presence of supercritical carbon dioxide (scCO2) at temperatures from 313 K to 353 K and pressures from 10.0 MPa to 20.0 MPa. The amount of adsorbed PGMEA considerably depended on the pressure and temperature conditions in scCO2, which could be explained by the effects of CO2 density and VOC fugacity. The Dubinin–Astakhov (DA) equation has two fitting parameters, interaction energy between adsorbate and adsorbent (EVOC) and saturated adsorption capacity of VOC on adsorbent (W0,VOC), and was used to correlate the measured adsorption equilibria. Correlation by the DA equation was useful for analyzing the adsorption equilibria of PGMEA on activated carbon in scCO2 by considering the affinity of the adsorbate for the adsorbent and competitive adsorption of CO2.
KW - Activated carbon
KW - Adsorption equilibria
KW - Dubinin–Astakhov equation
KW - Propylene glycol monomethyl ether acetate (PGMEA)
KW - Supercritical carbon dioxide
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U2 - 10.1016/j.fluid.2020.112556
DO - 10.1016/j.fluid.2020.112556
M3 - Article
AN - SCOPUS:85081117546
SN - 0378-3812
VL - 513
JO - Fluid Phase Equilibria
JF - Fluid Phase Equilibria
M1 - 112556
ER -