Synchrotron X-ray diffraction (XRD) and X-ray fluorescent (XRF) measurement techniques have been used for non-destructive characterization of surface oxide films on Type 316L austenitic stainless steels that were exposed to simulated primary water environments of pressurized water reactors (PWR) and boiling water reactors (BWR). The layer structures of the surface spinel oxides were revealed ex situ after oxidation by measurements made as a function of depth. The layer structure of spinel oxides formed in simulated PWR primary water should normally be different from that formed in simulated BWR water. After oxidation in the simulated BWR environment, the spinel oxide was observed to contain NiFe 2O4 at shallow depths, and FeCr2O4 and Fe3O4 at deeper depths. By contrast, after oxidation in the simulated PWR primary water environment, a Fe3O4 type spinel was observed near the surface and FeCr2O4 type spinel near the interface with the metal substrate. Furthermore, by in situ measurements during oxidation in the simulated BWR environment, it was also demonstrated that the ratio between spinel and hematite Fe2O 3 can be changed depending on the water condition such as BWR normal water chemistry or BWR hydrogen water chemistry.