Abstract
This paper discusses accurate measurement of aspherical surface profile on a precision grinding machine. It is confirmed that the positioning error of the probes causes a large evaluation error in the case of directly using the two-probe method. To solve this problem, a measurement system of indirectly employing the two-probe method is constructed. Computer simulation results and experimental results of on-machine measurement of the surface profile of an aspherical lens are also presented.
| Original language | English |
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| Pages | 161-164 |
| Number of pages | 4 |
| Publication status | Published - 2005 Jan 1 |
| Event | 5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 - Montpellier, France Duration: 2005 May 8 → 2005 May 11 |
Other
| Other | 5th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2005 |
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| Country/Territory | France |
| City | Montpellier |
| Period | 05/5/8 → 05/5/11 |
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering
- Mechanical Engineering
- Materials Science(all)
- Environmental Engineering
- Instrumentation